8/11/2010	12:14:19 AM	H2 valve closed
8/11/2010	12:14:19 AM	BCl3 valve closed
8/11/2010	12:14:19 AM	PH3 valve closed
8/11/2010	12:14:19 AM	SiCl4 pre valve closed
8/11/2010	12:14:19 AM	SiCl4 post valve closed
8/11/2010	12:14:19 AM	Main Vac valve closed
8/11/2010	12:14:19 AM	Bypass valve closed
8/11/2010	12:14:19 AM	Helium valve opened
8/11/2010	12:14:19 AM	Bubbler valve opened
8/11/2010	12:14:19 AM	Helium MFC set to  500.000000
8/11/2010	12:14:19 AM	H2 MFC set to  0.000000
8/11/2010	12:14:19 AM	BCl3 MFC set to  0.000000
8/11/2010	12:14:19 AM	PHl3 MFC set to  0.000000
8/11/2010	12:14:19 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:14:19 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:14:19 AM	Tube furnace set to 0
8/11/2010	12:34:19 AM	Helium valve closed
8/11/2010	12:34:19 AM	H2 valve closed
8/11/2010	12:34:19 AM	BCl3 valve closed
8/11/2010	12:34:19 AM	PH3 valve closed
8/11/2010	12:34:19 AM	SiCl4 pre valve closed
8/11/2010	12:34:19 AM	SiCl4 post valve closed
8/11/2010	12:34:19 AM	Main Vac valve closed
8/11/2010	12:34:19 AM	Bypass valve closed
8/11/2010	12:34:19 AM	Bubbler valve closed
8/11/2010	12:34:19 AM	Helium MFC set to  0.000000
8/11/2010	12:34:19 AM	H2 MFC set to  0.000000
8/11/2010	12:34:19 AM	BCl3 MFC set to  0.000000
8/11/2010	12:34:19 AM	PHl3 MFC set to  0.000000
8/11/2010	12:34:19 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:34:19 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:34:20 AM	Tube furnace set to 0
8/11/2010	12:34:20 AM	Run finished at 12:34 AM
8/11/2010	12:45:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	12:45:19 AM	Recipe started at 12:45 AM
8/11/2010	12:45:19 AM	Helium valve closed
8/11/2010	12:45:19 AM	H2 valve closed
8/11/2010	12:45:19 AM	BCl3 valve closed
8/11/2010	12:45:19 AM	PH3 valve closed
8/11/2010	12:45:19 AM	SiCl4 pre valve closed
8/11/2010	12:45:19 AM	SiCl4 post valve closed
8/11/2010	12:45:19 AM	Main Vac valve closed
8/11/2010	12:45:19 AM	Bubbler valve closed
8/11/2010	12:45:19 AM	Bypass valve opened
8/11/2010	12:45:19 AM	Helium MFC set to  0.000000
8/11/2010	12:45:19 AM	H2 MFC set to  0.000000
8/11/2010	12:45:19 AM	BCl3 MFC set to  0.000000
8/11/2010	12:45:19 AM	PHl3 MFC set to  0.000000
8/11/2010	12:45:19 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:45:19 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:45:19 AM	Tube furnace set to 0
8/11/2010	12:45:59 AM	Helium valve closed
8/11/2010	12:45:59 AM	H2 valve closed
8/11/2010	12:45:59 AM	BCl3 valve closed
8/11/2010	12:45:59 AM	PH3 valve closed
8/11/2010	12:45:59 AM	SiCl4 pre valve closed
8/11/2010	12:45:59 AM	SiCl4 post valve closed
8/11/2010	12:45:59 AM	Bubbler valve closed
8/11/2010	12:45:59 AM	Main Vac valve opened
8/11/2010	12:45:59 AM	Bypass valve opened
8/11/2010	12:45:59 AM	Helium MFC set to  0.000000
8/11/2010	12:45:59 AM	H2 MFC set to  0.000000
8/11/2010	12:45:59 AM	BCl3 MFC set to  0.000000
8/11/2010	12:45:59 AM	PHl3 MFC set to  0.000000
8/11/2010	12:45:59 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:45:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:45:59 AM	Tube furnace set to 0
8/11/2010	12:46:59 AM	H2 valve closed
8/11/2010	12:46:59 AM	BCl3 valve closed
8/11/2010	12:46:59 AM	PH3 valve closed
8/11/2010	12:46:59 AM	SiCl4 pre valve closed
8/11/2010	12:46:59 AM	SiCl4 post valve closed
8/11/2010	12:46:59 AM	Bubbler valve closed
8/11/2010	12:46:59 AM	Helium valve opened
8/11/2010	12:46:59 AM	Main Vac valve opened
8/11/2010	12:46:59 AM	Bypass valve opened
8/11/2010	12:46:59 AM	Helium MFC set to  100.000000
8/11/2010	12:46:59 AM	H2 MFC set to  0.000000
8/11/2010	12:46:59 AM	BCl3 MFC set to  0.000000
8/11/2010	12:46:59 AM	PHl3 MFC set to  0.000000
8/11/2010	12:46:59 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:46:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:46:59 AM	Tube furnace set to 0
8/11/2010	12:55:59 AM	Helium valve closed
8/11/2010	12:55:59 AM	H2 valve closed
8/11/2010	12:55:59 AM	BCl3 valve closed
8/11/2010	12:55:59 AM	PH3 valve closed
8/11/2010	12:55:59 AM	SiCl4 pre valve closed
8/11/2010	12:55:59 AM	SiCl4 post valve closed
8/11/2010	12:55:59 AM	Bubbler valve closed
8/11/2010	12:55:59 AM	Main Vac valve opened
8/11/2010	12:55:59 AM	Bypass valve opened
8/11/2010	12:55:59 AM	Helium MFC set to  0.000000
8/11/2010	12:55:59 AM	H2 MFC set to  0.000000
8/11/2010	12:55:59 AM	BCl3 MFC set to  0.000000
8/11/2010	12:55:59 AM	PHl3 MFC set to  0.000000
8/11/2010	12:55:59 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:55:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:55:59 AM	Tube furnace set to 0
8/11/2010	12:56:59 AM	H2 valve closed
8/11/2010	12:56:59 AM	BCl3 valve closed
8/11/2010	12:56:59 AM	PH3 valve closed
8/11/2010	12:56:59 AM	SiCl4 pre valve closed
8/11/2010	12:56:59 AM	SiCl4 post valve closed
8/11/2010	12:56:59 AM	Bubbler valve closed
8/11/2010	12:56:59 AM	Helium valve opened
8/11/2010	12:56:59 AM	Main Vac valve opened
8/11/2010	12:56:59 AM	Bypass valve opened
8/11/2010	12:56:59 AM	Helium MFC set to  100.000000
8/11/2010	12:56:59 AM	H2 MFC set to  0.000000
8/11/2010	12:56:59 AM	BCl3 MFC set to  0.000000
8/11/2010	12:56:59 AM	PHl3 MFC set to  0.000000
8/11/2010	12:56:59 AM	SiCl4 MFC set to  0.000000
8/11/2010	12:56:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:56:59 AM	Tube furnace set to 0
8/11/2010	1:05:59 AM	Helium valve closed
8/11/2010	1:05:59 AM	H2 valve closed
8/11/2010	1:05:59 AM	BCl3 valve closed
8/11/2010	1:05:59 AM	PH3 valve closed
8/11/2010	1:05:59 AM	SiCl4 pre valve closed
8/11/2010	1:05:59 AM	SiCl4 post valve closed
8/11/2010	1:05:59 AM	Bubbler valve closed
8/11/2010	1:05:59 AM	Main Vac valve opened
8/11/2010	1:05:59 AM	Bypass valve opened
8/11/2010	1:05:59 AM	Helium MFC set to  0.000000
8/11/2010	1:05:59 AM	H2 MFC set to  0.000000
8/11/2010	1:06:00 AM	BCl3 MFC set to  0.000000
8/11/2010	1:06:00 AM	PHl3 MFC set to  0.000000
8/11/2010	1:06:00 AM	SiCl4 MFC set to  0.000000
8/11/2010	1:06:00 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:06:00 AM	Tube furnace set to 0
8/11/2010	1:07:00 AM	H2 valve closed
8/11/2010	1:07:00 AM	BCl3 valve closed
8/11/2010	1:07:00 AM	PH3 valve closed
8/11/2010	1:07:00 AM	SiCl4 pre valve closed
8/11/2010	1:07:00 AM	SiCl4 post valve closed
8/11/2010	1:07:00 AM	Bubbler valve closed
8/11/2010	1:07:00 AM	Helium valve opened
8/11/2010	1:07:00 AM	Main Vac valve opened
8/11/2010	1:07:00 AM	Bypass valve opened
8/11/2010	1:07:00 AM	Helium MFC set to  100.000000
8/11/2010	1:07:00 AM	H2 MFC set to  0.000000
8/11/2010	1:07:00 AM	BCl3 MFC set to  0.000000
8/11/2010	1:07:00 AM	PHl3 MFC set to  0.000000
8/11/2010	1:07:00 AM	SiCl4 MFC set to  0.000000
8/11/2010	1:07:00 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:07:00 AM	Tube furnace set to 0
8/11/2010	1:16:00 AM	Helium valve closed
8/11/2010	1:16:00 AM	H2 valve closed
8/11/2010	1:16:00 AM	BCl3 valve closed
8/11/2010	1:16:00 AM	PH3 valve closed
8/11/2010	1:16:00 AM	SiCl4 pre valve closed
8/11/2010	1:16:00 AM	SiCl4 post valve closed
8/11/2010	1:16:00 AM	Bubbler valve closed
8/11/2010	1:16:00 AM	Main Vac valve opened
8/11/2010	1:16:00 AM	Bypass valve opened
8/11/2010	1:16:00 AM	Helium MFC set to  0.000000
8/11/2010	1:16:00 AM	H2 MFC set to  0.000000
8/11/2010	1:16:00 AM	BCl3 MFC set to  0.000000
8/11/2010	1:16:00 AM	PHl3 MFC set to  0.000000
8/11/2010	1:16:00 AM	SiCl4 MFC set to  0.000000
8/11/2010	1:16:00 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:16:00 AM	Tube furnace set to 0
8/11/2010	1:16:01 AM	Run finished at 1:16 AM
8/11/2010	1:16:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	1:21:08 AM	Helium MFC set to  100.000000
8/11/2010	1:21:10 AM	Helium valve opened
8/11/2010	1:37:08 AM	Helium valve closed
8/11/2010	1:37:49 AM	Recipe started at 1:37 AM
8/11/2010	1:37:49 AM	Helium valve closed
8/11/2010	1:37:49 AM	BCl3 valve closed
8/11/2010	1:37:49 AM	PH3 valve closed
8/11/2010	1:37:49 AM	SiCl4 pre valve closed
8/11/2010	1:37:49 AM	SiCl4 post valve closed
8/11/2010	1:37:49 AM	Main Vac valve closed
8/11/2010	1:37:49 AM	Bypass valve closed
8/11/2010	1:37:49 AM	Bubbler valve closed
8/11/2010	1:37:49 AM	H2 valve opened
8/11/2010	1:37:49 AM	Helium MFC set to  0.000000
8/11/2010	1:37:49 AM	H2 MFC set to  500.000000
8/11/2010	1:37:49 AM	BCl3 MFC set to  0.000000
8/11/2010	1:37:49 AM	PHl3 MFC set to  0.000000
8/11/2010	1:37:49 AM	SiCl4 MFC set to  0.000000
8/11/2010	1:37:49 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:37:49 AM	Tube furnace set to 1000
8/11/2010	1:39:08 AM	Helium valve closed
8/11/2010	1:39:08 AM	BCl3 valve closed
8/11/2010	1:39:08 AM	PH3 valve closed
8/11/2010	1:39:08 AM	SiCl4 pre valve closed
8/11/2010	1:39:08 AM	SiCl4 post valve closed
8/11/2010	1:39:08 AM	Main Vac valve closed
8/11/2010	1:39:08 AM	Bypass valve closed
8/11/2010	1:39:08 AM	H2 valve opened
8/11/2010	1:39:08 AM	Bubbler valve opened
8/11/2010	1:39:08 AM	Helium MFC set to  0.000000
8/11/2010	1:39:08 AM	H2 MFC set to  500.000000
8/11/2010	1:39:08 AM	BCl3 MFC set to  0.000000
8/11/2010	1:39:08 AM	PHl3 MFC set to  0.000000
8/11/2010	1:39:08 AM	SiCl4 MFC set to  0.000000
8/11/2010	1:39:08 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:39:09 AM	Tube furnace set to 1000
8/11/2010	1:59:09 AM	Helium valve closed
8/11/2010	1:59:09 AM	PH3 valve closed
8/11/2010	1:59:09 AM	Main Vac valve closed
8/11/2010	1:59:09 AM	Bypass valve closed
8/11/2010	1:59:09 AM	H2 valve opened
8/11/2010	1:59:09 AM	BCl3 valve opened
8/11/2010	1:59:09 AM	SiCl4 pre valve opened
8/11/2010	1:59:09 AM	SiCl4 post valve opened
8/11/2010	1:59:09 AM	Bubbler valve opened
8/11/2010	1:59:09 AM	Helium MFC set to  0.000000
8/11/2010	1:59:09 AM	H2 MFC set to  500.000000
8/11/2010	1:59:09 AM	BCl3 MFC set to  35.000000
8/11/2010	1:59:09 AM	PHl3 MFC set to  0.000000
8/11/2010	1:59:09 AM	SiCl4 MFC set to  50.000000
8/11/2010	1:59:09 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:59:09 AM	Tube furnace set to 1000
8/11/2010	2:11:09 AM	Helium valve closed
8/11/2010	2:11:09 AM	BCl3 valve closed
8/11/2010	2:11:09 AM	PH3 valve closed
8/11/2010	2:11:09 AM	SiCl4 pre valve closed
8/11/2010	2:11:09 AM	SiCl4 post valve closed
8/11/2010	2:11:09 AM	Main Vac valve closed
8/11/2010	2:11:09 AM	Bypass valve closed
8/11/2010	2:11:09 AM	H2 valve opened
8/11/2010	2:11:09 AM	Bubbler valve opened
8/11/2010	2:11:09 AM	Helium MFC set to  0.000000
8/11/2010	2:11:09 AM	H2 MFC set to  500.000000
8/11/2010	2:11:09 AM	BCl3 MFC set to  0.000000
8/11/2010	2:11:09 AM	PHl3 MFC set to  0.000000
8/11/2010	2:11:09 AM	SiCl4 MFC set to  0.000000
8/11/2010	2:11:09 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:11:09 AM	Tube furnace set to 750
8/11/2010	2:31:09 AM	H2 valve closed
8/11/2010	2:31:09 AM	BCl3 valve closed
8/11/2010	2:31:09 AM	PH3 valve closed
8/11/2010	2:31:09 AM	SiCl4 pre valve closed
8/11/2010	2:31:09 AM	SiCl4 post valve closed
8/11/2010	2:31:09 AM	Main Vac valve closed
8/11/2010	2:31:09 AM	Bypass valve closed
8/11/2010	2:31:09 AM	Helium valve opened
8/11/2010	2:31:09 AM	Bubbler valve opened
8/11/2010	2:31:09 AM	Helium MFC set to  500.000000
8/11/2010	2:31:09 AM	H2 MFC set to  0.000000
8/11/2010	2:31:09 AM	BCl3 MFC set to  0.000000
8/11/2010	2:31:09 AM	PHl3 MFC set to  0.000000
8/11/2010	2:31:09 AM	SiCl4 MFC set to  0.000000
8/11/2010	2:31:09 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:31:09 AM	Tube furnace set to 0
8/11/2010	2:51:01 AM	Helium valve closed
8/11/2010	2:51:01 AM	H2 valve closed
8/11/2010	2:51:01 AM	BCl3 valve closed
8/11/2010	2:51:01 AM	PH3 valve closed
8/11/2010	2:51:01 AM	SiCl4 pre valve closed
8/11/2010	2:51:01 AM	SiCl4 post valve closed
8/11/2010	2:51:01 AM	Main Vac valve closed
8/11/2010	2:51:01 AM	Bubbler valve closed
8/11/2010	2:51:01 AM	Bypass valve closed
8/11/2010	2:51:01 AM	Helium MFC set to  0.000000
8/11/2010	2:51:01 AM	H2 MFC set to  0.000000
8/11/2010	2:51:01 AM	BCl3 MFC set to  0.000000
8/11/2010	2:51:01 AM	PHl3 MFC set to  0.000000
8/11/2010	2:51:01 AM	SiCl4 MFC set to  0.000000
8/11/2010	2:51:01 AM	Bypass solenoid MFC set to  760.000000
8/11/2010	2:51:02 AM	Tube furnace set to 0
8/11/2010	2:51:02 AM	Baratron reads 741.318321 Torr and NaOH valve is open.  Emergency exit.
8/11/2010	2:51:11 AM	Run aborted at 2:51 AM
8/11/2010	2:51:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	2:51:14 AM	Recipe started at 2:51 AM
8/11/2010	2:51:14 AM	H2 valve closed
8/11/2010	2:51:14 AM	BCl3 valve closed
8/11/2010	2:51:14 AM	PH3 valve closed
8/11/2010	2:51:14 AM	SiCl4 pre valve closed
8/11/2010	2:51:14 AM	SiCl4 post valve closed
8/11/2010	2:51:14 AM	Main Vac valve closed
8/11/2010	2:51:14 AM	Bypass valve closed
8/11/2010	2:51:14 AM	Bubbler valve closed
8/11/2010	2:51:14 AM	Helium valve opened
8/11/2010	2:51:14 AM	Helium MFC set to  500.000000
8/11/2010	2:51:14 AM	H2 MFC set to  0.000000
8/11/2010	2:51:14 AM	BCl3 MFC set to  0.000000
8/11/2010	2:51:14 AM	PHl3 MFC set to  0.000000
8/11/2010	2:51:14 AM	SiCl4 MFC set to  0.000000
8/11/2010	2:51:14 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:51:14 AM	Tube furnace set to 0
8/11/2010	3:00:42 AM	Helium valve closed
8/11/2010	3:00:42 AM	H2 valve closed
8/11/2010	3:00:42 AM	BCl3 valve closed
8/11/2010	3:00:42 AM	PH3 valve closed
8/11/2010	3:00:42 AM	SiCl4 pre valve closed
8/11/2010	3:00:42 AM	SiCl4 post valve closed
8/11/2010	3:00:42 AM	Main Vac valve closed
8/11/2010	3:00:42 AM	Bypass valve closed
8/11/2010	3:00:42 AM	Bubbler valve closed
8/11/2010	3:00:42 AM	Helium MFC set to  0.000000
8/11/2010	3:00:42 AM	H2 MFC set to  0.000000
8/11/2010	3:00:42 AM	BCl3 MFC set to  0.000000
8/11/2010	3:00:42 AM	PHl3 MFC set to  0.000000
8/11/2010	3:00:42 AM	SiCl4 MFC set to  0.000000
8/11/2010	3:00:42 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:00:42 AM	Tube furnace set to 0
8/11/2010	3:00:43 AM	Run finished at 3:00 AM
8/11/2010	3:00:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	3:01:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	3:01:19 AM	Recipe started at 3:01 AM
8/11/2010	3:01:19 AM	Helium valve closed
8/11/2010	3:01:19 AM	H2 valve closed
8/11/2010	3:01:19 AM	BCl3 valve closed
8/11/2010	3:01:19 AM	PH3 valve closed
8/11/2010	3:01:19 AM	SiCl4 pre valve closed
8/11/2010	3:01:19 AM	SiCl4 post valve closed
8/11/2010	3:01:19 AM	Main Vac valve closed
8/11/2010	3:01:19 AM	Bubbler valve closed
8/11/2010	3:01:19 AM	Bypass valve opened
8/11/2010	3:01:19 AM	Helium MFC set to  0.000000
8/11/2010	3:01:19 AM	H2 MFC set to  0.000000
8/11/2010	3:01:19 AM	BCl3 MFC set to  0.000000
8/11/2010	3:01:19 AM	PHl3 MFC set to  0.000000
8/11/2010	3:01:19 AM	SiCl4 MFC set to  0.000000
8/11/2010	3:01:19 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:01:19 AM	Tube furnace set to 0
8/11/2010	3:01:55 AM	Helium valve closed
8/11/2010	3:01:55 AM	H2 valve closed
8/11/2010	3:01:55 AM	BCl3 valve closed
8/11/2010	3:01:55 AM	PH3 valve closed
8/11/2010	3:01:55 AM	SiCl4 pre valve closed
8/11/2010	3:01:55 AM	SiCl4 post valve closed
8/11/2010	3:01:55 AM	Bubbler valve closed
8/11/2010	3:01:55 AM	Main Vac valve opened
8/11/2010	3:01:55 AM	Bypass valve opened
8/11/2010	3:01:55 AM	Helium MFC set to  0.000000
8/11/2010	3:01:55 AM	H2 MFC set to  0.000000
8/11/2010	3:01:55 AM	BCl3 MFC set to  0.000000
8/11/2010	3:01:55 AM	PHl3 MFC set to  0.000000
8/11/2010	3:01:55 AM	SiCl4 MFC set to  0.000000
8/11/2010	3:01:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:01:55 AM	Tube furnace set to 0
8/11/2010	3:01:55 AM	Run finished at 3:01 AM
8/11/2010	3:01:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	11:25:15 AM	Recipe started at 11:25 AM
8/11/2010	11:25:15 AM	Helium valve closed
8/11/2010	11:25:15 AM	BCl3 valve closed
8/11/2010	11:25:15 AM	PH3 valve closed
8/11/2010	11:25:15 AM	SiCl4 pre valve closed
8/11/2010	11:25:15 AM	SiCl4 post valve closed
8/11/2010	11:25:15 AM	Main Vac valve closed
8/11/2010	11:25:15 AM	Bypass valve closed
8/11/2010	11:25:15 AM	Bubbler valve closed
8/11/2010	11:25:15 AM	H2 valve opened
8/11/2010	11:25:15 AM	Helium MFC set to  0.000000
8/11/2010	11:25:15 AM	H2 MFC set to  500.000000
8/11/2010	11:25:15 AM	BCl3 MFC set to  0.000000
8/11/2010	11:25:15 AM	PHl3 MFC set to  0.000000
8/11/2010	11:25:15 AM	SiCl4 MFC set to  0.000000
8/11/2010	11:25:15 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	11:25:16 AM	Tube furnace set to 1000
8/11/2010	11:26:38 AM	Helium valve closed
8/11/2010	11:26:38 AM	BCl3 valve closed
8/11/2010	11:26:38 AM	PH3 valve closed
8/11/2010	11:26:38 AM	SiCl4 pre valve closed
8/11/2010	11:26:38 AM	SiCl4 post valve closed
8/11/2010	11:26:38 AM	Main Vac valve closed
8/11/2010	11:26:38 AM	Bypass valve closed
8/11/2010	11:26:38 AM	H2 valve opened
8/11/2010	11:26:38 AM	Bubbler valve opened
8/11/2010	11:26:38 AM	Helium MFC set to  0.000000
8/11/2010	11:26:38 AM	H2 MFC set to  500.000000
8/11/2010	11:26:38 AM	BCl3 MFC set to  0.000000
8/11/2010	11:26:38 AM	PHl3 MFC set to  0.000000
8/11/2010	11:26:38 AM	SiCl4 MFC set to  0.000000
8/11/2010	11:26:38 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	11:26:38 AM	Tube furnace set to 1000
8/11/2010	11:46:38 AM	Helium valve closed
8/11/2010	11:46:38 AM	PH3 valve closed
8/11/2010	11:46:38 AM	Main Vac valve closed
8/11/2010	11:46:38 AM	Bypass valve closed
8/11/2010	11:46:38 AM	H2 valve opened
8/11/2010	11:46:38 AM	BCl3 valve opened
8/11/2010	11:46:38 AM	SiCl4 pre valve opened
8/11/2010	11:46:38 AM	SiCl4 post valve opened
8/11/2010	11:46:38 AM	Bubbler valve opened
8/11/2010	11:46:38 AM	Helium MFC set to  0.000000
8/11/2010	11:46:38 AM	H2 MFC set to  500.000000
8/11/2010	11:46:38 AM	BCl3 MFC set to  35.000000
8/11/2010	11:46:38 AM	PHl3 MFC set to  0.000000
8/11/2010	11:46:38 AM	SiCl4 MFC set to  50.000000
8/11/2010	11:46:38 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	11:46:38 AM	Tube furnace set to 1000
8/11/2010	11:58:38 AM	Helium valve closed
8/11/2010	11:58:38 AM	BCl3 valve closed
8/11/2010	11:58:38 AM	PH3 valve closed
8/11/2010	11:58:38 AM	SiCl4 pre valve closed
8/11/2010	11:58:38 AM	SiCl4 post valve closed
8/11/2010	11:58:38 AM	Main Vac valve closed
8/11/2010	11:58:38 AM	Bypass valve closed
8/11/2010	11:58:38 AM	H2 valve opened
8/11/2010	11:58:38 AM	Bubbler valve opened
8/11/2010	11:58:38 AM	Helium MFC set to  0.000000
8/11/2010	11:58:38 AM	H2 MFC set to  500.000000
8/11/2010	11:58:38 AM	BCl3 MFC set to  0.000000
8/11/2010	11:58:38 AM	PHl3 MFC set to  0.000000
8/11/2010	11:58:38 AM	SiCl4 MFC set to  0.000000
8/11/2010	11:58:38 AM	Bypass solenoid MFC set to  0.000000
8/11/2010	11:58:38 AM	Tube furnace set to 750
8/11/2010	12:18:38 PM	H2 valve closed
8/11/2010	12:18:38 PM	BCl3 valve closed
8/11/2010	12:18:38 PM	PH3 valve closed
8/11/2010	12:18:38 PM	SiCl4 pre valve closed
8/11/2010	12:18:38 PM	SiCl4 post valve closed
8/11/2010	12:18:38 PM	Main Vac valve closed
8/11/2010	12:18:38 PM	Bypass valve closed
8/11/2010	12:18:38 PM	Helium valve opened
8/11/2010	12:18:38 PM	Bubbler valve opened
8/11/2010	12:18:38 PM	Helium MFC set to  500.000000
8/11/2010	12:18:38 PM	H2 MFC set to  0.000000
8/11/2010	12:18:38 PM	BCl3 MFC set to  0.000000
8/11/2010	12:18:38 PM	PHl3 MFC set to  0.000000
8/11/2010	12:18:38 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:18:38 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:18:39 PM	Tube furnace set to 0
8/11/2010	12:30:20 PM	Run aborted at 12:30 PM
8/11/2010	12:30:20 PM	Helium valve closed
8/11/2010	12:30:20 PM	H2 valve closed
8/11/2010	12:30:20 PM	BCl3 valve closed
8/11/2010	12:30:20 PM	PH3 valve closed
8/11/2010	12:30:20 PM	SiCl4 pre valve closed
8/11/2010	12:30:20 PM	SiCl4 post valve closed
8/11/2010	12:30:20 PM	Bypass valve closed
8/11/2010	12:30:20 PM	Main Vac valve closed
8/11/2010	12:30:20 PM	Bubbler valve closed
8/11/2010	12:30:20 PM	Helium MFC set to  0.000000
8/11/2010	12:30:20 PM	H2 MFC set to  0.000000
8/11/2010	12:30:20 PM	BCl3 MFC set to  0.000000
8/11/2010	12:30:20 PM	PHl3 MFC set to  0.000000
8/11/2010	12:30:20 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:30:20 PM	Tube furnace set to 0
8/11/2010	12:30:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	12:30:21 PM	Recipe started at 12:30 PM
8/11/2010	12:30:21 PM	H2 valve closed
8/11/2010	12:30:21 PM	BCl3 valve closed
8/11/2010	12:30:21 PM	PH3 valve closed
8/11/2010	12:30:21 PM	SiCl4 pre valve closed
8/11/2010	12:30:21 PM	SiCl4 post valve closed
8/11/2010	12:30:21 PM	Main Vac valve closed
8/11/2010	12:30:21 PM	Bypass valve closed
8/11/2010	12:30:21 PM	Bubbler valve closed
8/11/2010	12:30:21 PM	Helium valve opened
8/11/2010	12:30:21 PM	Helium MFC set to  500.000000
8/11/2010	12:30:21 PM	H2 MFC set to  0.000000
8/11/2010	12:30:21 PM	BCl3 MFC set to  0.000000
8/11/2010	12:30:21 PM	PHl3 MFC set to  0.000000
8/11/2010	12:30:21 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:30:21 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:30:22 PM	Tube furnace set to 0
8/11/2010	12:30:22 PM	Helium valve closed
8/11/2010	12:30:22 PM	H2 valve closed
8/11/2010	12:30:22 PM	BCl3 valve closed
8/11/2010	12:30:22 PM	PH3 valve closed
8/11/2010	12:30:22 PM	SiCl4 pre valve closed
8/11/2010	12:30:22 PM	SiCl4 post valve closed
8/11/2010	12:30:22 PM	Main Vac valve closed
8/11/2010	12:30:22 PM	Bypass valve closed
8/11/2010	12:30:22 PM	Bubbler valve closed
8/11/2010	12:30:22 PM	Helium MFC set to  0.000000
8/11/2010	12:30:22 PM	H2 MFC set to  0.000000
8/11/2010	12:30:22 PM	BCl3 MFC set to  0.000000
8/11/2010	12:30:22 PM	PHl3 MFC set to  0.000000
8/11/2010	12:30:22 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:30:22 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:30:22 PM	Tube furnace set to 0
8/11/2010	12:30:22 PM	Run finished at 12:30 PM
8/11/2010	12:30:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	12:40:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	12:40:01 PM	Recipe started at 12:40 PM
8/11/2010	12:40:01 PM	Helium valve closed
8/11/2010	12:40:01 PM	H2 valve closed
8/11/2010	12:40:01 PM	BCl3 valve closed
8/11/2010	12:40:01 PM	PH3 valve closed
8/11/2010	12:40:01 PM	SiCl4 pre valve closed
8/11/2010	12:40:01 PM	SiCl4 post valve closed
8/11/2010	12:40:01 PM	Main Vac valve closed
8/11/2010	12:40:01 PM	Bubbler valve closed
8/11/2010	12:40:01 PM	Bypass valve opened
8/11/2010	12:40:01 PM	Helium MFC set to  0.000000
8/11/2010	12:40:01 PM	H2 MFC set to  0.000000
8/11/2010	12:40:01 PM	BCl3 MFC set to  0.000000
8/11/2010	12:40:01 PM	PHl3 MFC set to  0.000000
8/11/2010	12:40:01 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:40:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:40:01 PM	Tube furnace set to 0
8/11/2010	12:40:16 PM	Helium valve closed
8/11/2010	12:40:16 PM	H2 valve closed
8/11/2010	12:40:16 PM	BCl3 valve closed
8/11/2010	12:40:16 PM	PH3 valve closed
8/11/2010	12:40:16 PM	SiCl4 pre valve closed
8/11/2010	12:40:16 PM	SiCl4 post valve closed
8/11/2010	12:40:16 PM	Bubbler valve closed
8/11/2010	12:40:16 PM	Main Vac valve opened
8/11/2010	12:40:16 PM	Bypass valve opened
8/11/2010	12:40:16 PM	Helium MFC set to  0.000000
8/11/2010	12:40:16 PM	H2 MFC set to  0.000000
8/11/2010	12:40:16 PM	BCl3 MFC set to  0.000000
8/11/2010	12:40:16 PM	PHl3 MFC set to  0.000000
8/11/2010	12:40:16 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:40:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:40:16 PM	Tube furnace set to 0
8/11/2010	12:40:16 PM	Run finished at 12:40 PM
8/11/2010	12:40:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	12:40:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	12:40:20 PM	Recipe started at 12:40 PM
8/11/2010	12:40:20 PM	H2 valve closed
8/11/2010	12:40:20 PM	BCl3 valve closed
8/11/2010	12:40:20 PM	PH3 valve closed
8/11/2010	12:40:20 PM	SiCl4 pre valve closed
8/11/2010	12:40:20 PM	SiCl4 post valve closed
8/11/2010	12:40:20 PM	Main Vac valve closed
8/11/2010	12:40:20 PM	Bypass valve closed
8/11/2010	12:40:20 PM	Bubbler valve closed
8/11/2010	12:40:20 PM	Helium valve opened
8/11/2010	12:40:20 PM	Helium MFC set to  500.000000
8/11/2010	12:40:20 PM	H2 MFC set to  0.000000
8/11/2010	12:40:20 PM	BCl3 MFC set to  0.000000
8/11/2010	12:40:20 PM	PHl3 MFC set to  0.000000
8/11/2010	12:40:20 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:40:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:40:20 PM	Tube furnace set to 0
8/11/2010	12:41:37 PM	Helium valve closed
8/11/2010	12:41:37 PM	H2 valve closed
8/11/2010	12:41:37 PM	BCl3 valve closed
8/11/2010	12:41:37 PM	PH3 valve closed
8/11/2010	12:41:37 PM	SiCl4 pre valve closed
8/11/2010	12:41:38 PM	SiCl4 post valve closed
8/11/2010	12:41:38 PM	Main Vac valve closed
8/11/2010	12:41:38 PM	Bypass valve closed
8/11/2010	12:41:38 PM	Bubbler valve closed
8/11/2010	12:41:38 PM	Helium MFC set to  0.000000
8/11/2010	12:41:38 PM	H2 MFC set to  0.000000
8/11/2010	12:41:38 PM	BCl3 MFC set to  0.000000
8/11/2010	12:41:38 PM	PHl3 MFC set to  0.000000
8/11/2010	12:41:38 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:41:38 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:41:38 PM	Tube furnace set to 0
8/11/2010	12:41:38 PM	Run finished at 12:41 PM
8/11/2010	12:41:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	12:41:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	12:41:51 PM	Recipe started at 12:41 PM
8/11/2010	12:41:51 PM	Helium valve closed
8/11/2010	12:41:51 PM	H2 valve closed
8/11/2010	12:41:51 PM	BCl3 valve closed
8/11/2010	12:41:51 PM	PH3 valve closed
8/11/2010	12:41:51 PM	SiCl4 pre valve closed
8/11/2010	12:41:51 PM	SiCl4 post valve closed
8/11/2010	12:41:51 PM	Main Vac valve closed
8/11/2010	12:41:51 PM	Bubbler valve closed
8/11/2010	12:41:51 PM	Bypass valve opened
8/11/2010	12:41:51 PM	Helium MFC set to  0.000000
8/11/2010	12:41:51 PM	H2 MFC set to  0.000000
8/11/2010	12:41:51 PM	BCl3 MFC set to  0.000000
8/11/2010	12:41:51 PM	PHl3 MFC set to  0.000000
8/11/2010	12:41:51 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:41:51 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:41:52 PM	Tube furnace set to 0
8/11/2010	12:42:19 PM	Helium valve closed
8/11/2010	12:42:19 PM	H2 valve closed
8/11/2010	12:42:19 PM	BCl3 valve closed
8/11/2010	12:42:19 PM	PH3 valve closed
8/11/2010	12:42:19 PM	SiCl4 pre valve closed
8/11/2010	12:42:19 PM	SiCl4 post valve closed
8/11/2010	12:42:19 PM	Bubbler valve closed
8/11/2010	12:42:19 PM	Main Vac valve opened
8/11/2010	12:42:19 PM	Bypass valve opened
8/11/2010	12:42:19 PM	Helium MFC set to  0.000000
8/11/2010	12:42:19 PM	H2 MFC set to  0.000000
8/11/2010	12:42:19 PM	BCl3 MFC set to  0.000000
8/11/2010	12:42:19 PM	PHl3 MFC set to  0.000000
8/11/2010	12:42:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:42:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:42:19 PM	Tube furnace set to 0
8/11/2010	12:43:19 PM	H2 valve closed
8/11/2010	12:43:19 PM	BCl3 valve closed
8/11/2010	12:43:19 PM	PH3 valve closed
8/11/2010	12:43:19 PM	SiCl4 pre valve closed
8/11/2010	12:43:19 PM	SiCl4 post valve closed
8/11/2010	12:43:19 PM	Bubbler valve closed
8/11/2010	12:43:19 PM	Helium valve opened
8/11/2010	12:43:19 PM	Main Vac valve opened
8/11/2010	12:43:19 PM	Bypass valve opened
8/11/2010	12:43:19 PM	Helium MFC set to  100.000000
8/11/2010	12:43:19 PM	H2 MFC set to  0.000000
8/11/2010	12:43:19 PM	BCl3 MFC set to  0.000000
8/11/2010	12:43:19 PM	PHl3 MFC set to  0.000000
8/11/2010	12:43:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:43:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:43:19 PM	Tube furnace set to 0
8/11/2010	12:52:19 PM	Helium valve closed
8/11/2010	12:52:19 PM	H2 valve closed
8/11/2010	12:52:19 PM	BCl3 valve closed
8/11/2010	12:52:19 PM	PH3 valve closed
8/11/2010	12:52:19 PM	SiCl4 pre valve closed
8/11/2010	12:52:19 PM	SiCl4 post valve closed
8/11/2010	12:52:19 PM	Bubbler valve closed
8/11/2010	12:52:19 PM	Main Vac valve opened
8/11/2010	12:52:19 PM	Bypass valve opened
8/11/2010	12:52:19 PM	Helium MFC set to  0.000000
8/11/2010	12:52:19 PM	H2 MFC set to  0.000000
8/11/2010	12:52:19 PM	BCl3 MFC set to  0.000000
8/11/2010	12:52:19 PM	PHl3 MFC set to  0.000000
8/11/2010	12:52:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:52:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:52:19 PM	Tube furnace set to 0
8/11/2010	12:53:19 PM	H2 valve closed
8/11/2010	12:53:19 PM	BCl3 valve closed
8/11/2010	12:53:19 PM	PH3 valve closed
8/11/2010	12:53:19 PM	SiCl4 pre valve closed
8/11/2010	12:53:19 PM	SiCl4 post valve closed
8/11/2010	12:53:19 PM	Bubbler valve closed
8/11/2010	12:53:19 PM	Helium valve opened
8/11/2010	12:53:19 PM	Main Vac valve opened
8/11/2010	12:53:19 PM	Bypass valve opened
8/11/2010	12:53:19 PM	Helium MFC set to  100.000000
8/11/2010	12:53:19 PM	H2 MFC set to  0.000000
8/11/2010	12:53:19 PM	BCl3 MFC set to  0.000000
8/11/2010	12:53:19 PM	PHl3 MFC set to  0.000000
8/11/2010	12:53:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	12:53:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	12:53:19 PM	Tube furnace set to 0
8/11/2010	1:02:19 PM	Helium valve closed
8/11/2010	1:02:19 PM	H2 valve closed
8/11/2010	1:02:19 PM	BCl3 valve closed
8/11/2010	1:02:19 PM	PH3 valve closed
8/11/2010	1:02:19 PM	SiCl4 pre valve closed
8/11/2010	1:02:19 PM	SiCl4 post valve closed
8/11/2010	1:02:19 PM	Bubbler valve closed
8/11/2010	1:02:19 PM	Main Vac valve opened
8/11/2010	1:02:19 PM	Bypass valve opened
8/11/2010	1:02:19 PM	Helium MFC set to  0.000000
8/11/2010	1:02:19 PM	H2 MFC set to  0.000000
8/11/2010	1:02:19 PM	BCl3 MFC set to  0.000000
8/11/2010	1:02:19 PM	PHl3 MFC set to  0.000000
8/11/2010	1:02:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:02:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:02:20 PM	Tube furnace set to 0
8/11/2010	1:03:20 PM	H2 valve closed
8/11/2010	1:03:20 PM	BCl3 valve closed
8/11/2010	1:03:20 PM	PH3 valve closed
8/11/2010	1:03:20 PM	SiCl4 pre valve closed
8/11/2010	1:03:20 PM	SiCl4 post valve closed
8/11/2010	1:03:20 PM	Bubbler valve closed
8/11/2010	1:03:20 PM	Helium valve opened
8/11/2010	1:03:20 PM	Main Vac valve opened
8/11/2010	1:03:20 PM	Bypass valve opened
8/11/2010	1:03:20 PM	Helium MFC set to  100.000000
8/11/2010	1:03:20 PM	H2 MFC set to  0.000000
8/11/2010	1:03:20 PM	BCl3 MFC set to  0.000000
8/11/2010	1:03:20 PM	PHl3 MFC set to  0.000000
8/11/2010	1:03:20 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:03:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:03:20 PM	Tube furnace set to 0
8/11/2010	1:12:20 PM	Helium valve closed
8/11/2010	1:12:20 PM	H2 valve closed
8/11/2010	1:12:20 PM	BCl3 valve closed
8/11/2010	1:12:20 PM	PH3 valve closed
8/11/2010	1:12:20 PM	SiCl4 pre valve closed
8/11/2010	1:12:20 PM	SiCl4 post valve closed
8/11/2010	1:12:20 PM	Bubbler valve closed
8/11/2010	1:12:20 PM	Main Vac valve opened
8/11/2010	1:12:20 PM	Bypass valve opened
8/11/2010	1:12:20 PM	Helium MFC set to  0.000000
8/11/2010	1:12:20 PM	H2 MFC set to  0.000000
8/11/2010	1:12:20 PM	BCl3 MFC set to  0.000000
8/11/2010	1:12:20 PM	PHl3 MFC set to  0.000000
8/11/2010	1:12:20 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:12:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:12:20 PM	Tube furnace set to 0
8/11/2010	1:12:21 PM	Run finished at 1:12 PM
8/11/2010	1:12:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	1:28:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	1:28:24 PM	Recipe started at 1:28 PM
8/11/2010	1:28:24 PM	Helium valve closed
8/11/2010	1:28:24 PM	H2 valve closed
8/11/2010	1:28:24 PM	BCl3 valve closed
8/11/2010	1:28:24 PM	PH3 valve closed
8/11/2010	1:28:24 PM	SiCl4 pre valve closed
8/11/2010	1:28:24 PM	SiCl4 post valve closed
8/11/2010	1:28:24 PM	Main Vac valve closed
8/11/2010	1:28:24 PM	Bubbler valve closed
8/11/2010	1:28:24 PM	Bypass valve opened
8/11/2010	1:28:24 PM	Helium MFC set to  0.000000
8/11/2010	1:28:24 PM	H2 MFC set to  0.000000
8/11/2010	1:28:24 PM	BCl3 MFC set to  0.000000
8/11/2010	1:28:24 PM	PHl3 MFC set to  0.000000
8/11/2010	1:28:24 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:28:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:28:24 PM	Tube furnace set to 0
8/11/2010	1:28:24 PM	Helium valve closed
8/11/2010	1:28:24 PM	H2 valve closed
8/11/2010	1:28:24 PM	BCl3 valve closed
8/11/2010	1:28:24 PM	PH3 valve closed
8/11/2010	1:28:24 PM	SiCl4 pre valve closed
8/11/2010	1:28:24 PM	SiCl4 post valve closed
8/11/2010	1:28:24 PM	Bubbler valve closed
8/11/2010	1:28:24 PM	Main Vac valve opened
8/11/2010	1:28:24 PM	Bypass valve opened
8/11/2010	1:28:24 PM	Helium MFC set to  0.000000
8/11/2010	1:28:24 PM	H2 MFC set to  0.000000
8/11/2010	1:28:24 PM	BCl3 MFC set to  0.000000
8/11/2010	1:28:24 PM	PHl3 MFC set to  0.000000
8/11/2010	1:28:24 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:28:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:28:24 PM	Tube furnace set to 0
8/11/2010	1:29:24 PM	H2 valve closed
8/11/2010	1:29:24 PM	BCl3 valve closed
8/11/2010	1:29:24 PM	PH3 valve closed
8/11/2010	1:29:24 PM	SiCl4 pre valve closed
8/11/2010	1:29:24 PM	SiCl4 post valve closed
8/11/2010	1:29:24 PM	Bubbler valve closed
8/11/2010	1:29:24 PM	Helium valve opened
8/11/2010	1:29:24 PM	Main Vac valve opened
8/11/2010	1:29:24 PM	Bypass valve opened
8/11/2010	1:29:24 PM	Helium MFC set to  100.000000
8/11/2010	1:29:24 PM	H2 MFC set to  0.000000
8/11/2010	1:29:24 PM	BCl3 MFC set to  0.000000
8/11/2010	1:29:24 PM	PHl3 MFC set to  0.000000
8/11/2010	1:29:24 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:29:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:29:24 PM	Tube furnace set to 0
8/11/2010	1:38:24 PM	Helium valve closed
8/11/2010	1:38:24 PM	H2 valve closed
8/11/2010	1:38:24 PM	BCl3 valve closed
8/11/2010	1:38:24 PM	PH3 valve closed
8/11/2010	1:38:24 PM	SiCl4 pre valve closed
8/11/2010	1:38:24 PM	SiCl4 post valve closed
8/11/2010	1:38:24 PM	Bubbler valve closed
8/11/2010	1:38:25 PM	Main Vac valve opened
8/11/2010	1:38:25 PM	Bypass valve opened
8/11/2010	1:38:25 PM	Helium MFC set to  0.000000
8/11/2010	1:38:25 PM	H2 MFC set to  0.000000
8/11/2010	1:38:25 PM	BCl3 MFC set to  0.000000
8/11/2010	1:38:25 PM	PHl3 MFC set to  0.000000
8/11/2010	1:38:25 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:38:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:38:25 PM	Tube furnace set to 0
8/11/2010	1:39:25 PM	H2 valve closed
8/11/2010	1:39:25 PM	BCl3 valve closed
8/11/2010	1:39:25 PM	PH3 valve closed
8/11/2010	1:39:25 PM	SiCl4 pre valve closed
8/11/2010	1:39:25 PM	SiCl4 post valve closed
8/11/2010	1:39:25 PM	Bubbler valve closed
8/11/2010	1:39:25 PM	Helium valve opened
8/11/2010	1:39:25 PM	Main Vac valve opened
8/11/2010	1:39:25 PM	Bypass valve opened
8/11/2010	1:39:25 PM	Helium MFC set to  100.000000
8/11/2010	1:39:25 PM	H2 MFC set to  0.000000
8/11/2010	1:39:25 PM	BCl3 MFC set to  0.000000
8/11/2010	1:39:25 PM	PHl3 MFC set to  0.000000
8/11/2010	1:39:25 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:39:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:39:25 PM	Tube furnace set to 0
8/11/2010	1:48:25 PM	Helium valve closed
8/11/2010	1:48:25 PM	H2 valve closed
8/11/2010	1:48:25 PM	BCl3 valve closed
8/11/2010	1:48:25 PM	PH3 valve closed
8/11/2010	1:48:25 PM	SiCl4 pre valve closed
8/11/2010	1:48:25 PM	SiCl4 post valve closed
8/11/2010	1:48:25 PM	Bubbler valve closed
8/11/2010	1:48:25 PM	Main Vac valve opened
8/11/2010	1:48:25 PM	Bypass valve opened
8/11/2010	1:48:25 PM	Helium MFC set to  0.000000
8/11/2010	1:48:25 PM	H2 MFC set to  0.000000
8/11/2010	1:48:25 PM	BCl3 MFC set to  0.000000
8/11/2010	1:48:25 PM	PHl3 MFC set to  0.000000
8/11/2010	1:48:25 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:48:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:48:25 PM	Tube furnace set to 0
8/11/2010	1:49:25 PM	H2 valve closed
8/11/2010	1:49:25 PM	BCl3 valve closed
8/11/2010	1:49:25 PM	PH3 valve closed
8/11/2010	1:49:25 PM	SiCl4 pre valve closed
8/11/2010	1:49:25 PM	SiCl4 post valve closed
8/11/2010	1:49:25 PM	Bubbler valve closed
8/11/2010	1:49:25 PM	Helium valve opened
8/11/2010	1:49:25 PM	Main Vac valve opened
8/11/2010	1:49:25 PM	Bypass valve opened
8/11/2010	1:49:25 PM	Helium MFC set to  100.000000
8/11/2010	1:49:25 PM	H2 MFC set to  0.000000
8/11/2010	1:49:25 PM	BCl3 MFC set to  0.000000
8/11/2010	1:49:25 PM	PHl3 MFC set to  0.000000
8/11/2010	1:49:25 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:49:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:49:25 PM	Tube furnace set to 0
8/11/2010	1:58:25 PM	Helium valve closed
8/11/2010	1:58:25 PM	H2 valve closed
8/11/2010	1:58:25 PM	BCl3 valve closed
8/11/2010	1:58:25 PM	PH3 valve closed
8/11/2010	1:58:25 PM	SiCl4 pre valve closed
8/11/2010	1:58:25 PM	SiCl4 post valve closed
8/11/2010	1:58:25 PM	Bubbler valve closed
8/11/2010	1:58:25 PM	Main Vac valve opened
8/11/2010	1:58:25 PM	Bypass valve opened
8/11/2010	1:58:25 PM	Helium MFC set to  0.000000
8/11/2010	1:58:25 PM	H2 MFC set to  0.000000
8/11/2010	1:58:25 PM	BCl3 MFC set to  0.000000
8/11/2010	1:58:25 PM	PHl3 MFC set to  0.000000
8/11/2010	1:58:25 PM	SiCl4 MFC set to  0.000000
8/11/2010	1:58:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	1:58:26 PM	Tube furnace set to 0
8/11/2010	1:58:27 PM	Run finished at 1:58 PM
8/11/2010	1:58:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	2:03:05 PM	Helium MFC set to  100.000000
8/11/2010	2:03:06 PM	Helium valve opened
8/11/2010	2:04:07 PM	Helium valve closed
8/11/2010	2:04:10 PM	Helium MFC set to  0.000000
8/11/2010	2:04:57 PM	Recipe started at 2:04 PM
8/11/2010	2:04:57 PM	Helium valve closed
8/11/2010	2:04:57 PM	BCl3 valve closed
8/11/2010	2:04:57 PM	PH3 valve closed
8/11/2010	2:04:57 PM	SiCl4 pre valve closed
8/11/2010	2:04:57 PM	SiCl4 post valve closed
8/11/2010	2:04:57 PM	Main Vac valve closed
8/11/2010	2:04:57 PM	Bypass valve closed
8/11/2010	2:04:57 PM	Bubbler valve closed
8/11/2010	2:04:57 PM	H2 valve opened
8/11/2010	2:04:57 PM	Helium MFC set to  0.000000
8/11/2010	2:04:57 PM	H2 MFC set to  500.000000
8/11/2010	2:04:57 PM	BCl3 MFC set to  0.000000
8/11/2010	2:04:57 PM	PHl3 MFC set to  0.000000
8/11/2010	2:04:57 PM	SiCl4 MFC set to  0.000000
8/11/2010	2:04:57 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:04:57 PM	Tube furnace set to 1000
8/11/2010	2:06:16 PM	Helium valve closed
8/11/2010	2:06:16 PM	BCl3 valve closed
8/11/2010	2:06:16 PM	PH3 valve closed
8/11/2010	2:06:16 PM	SiCl4 pre valve closed
8/11/2010	2:06:16 PM	SiCl4 post valve closed
8/11/2010	2:06:16 PM	Main Vac valve closed
8/11/2010	2:06:16 PM	Bypass valve closed
8/11/2010	2:06:16 PM	H2 valve opened
8/11/2010	2:06:16 PM	Bubbler valve opened
8/11/2010	2:06:16 PM	Helium MFC set to  0.000000
8/11/2010	2:06:16 PM	H2 MFC set to  500.000000
8/11/2010	2:06:16 PM	BCl3 MFC set to  0.000000
8/11/2010	2:06:16 PM	PHl3 MFC set to  0.000000
8/11/2010	2:06:16 PM	SiCl4 MFC set to  0.000000
8/11/2010	2:06:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:06:16 PM	Tube furnace set to 1000
8/11/2010	2:26:16 PM	Helium valve closed
8/11/2010	2:26:16 PM	PH3 valve closed
8/11/2010	2:26:16 PM	Main Vac valve closed
8/11/2010	2:26:16 PM	Bypass valve closed
8/11/2010	2:26:16 PM	H2 valve opened
8/11/2010	2:26:16 PM	BCl3 valve opened
8/11/2010	2:26:16 PM	SiCl4 pre valve opened
8/11/2010	2:26:16 PM	SiCl4 post valve opened
8/11/2010	2:26:16 PM	Bubbler valve opened
8/11/2010	2:26:16 PM	Helium MFC set to  0.000000
8/11/2010	2:26:16 PM	H2 MFC set to  500.000000
8/11/2010	2:26:16 PM	BCl3 MFC set to  35.000000
8/11/2010	2:26:16 PM	PHl3 MFC set to  0.000000
8/11/2010	2:26:16 PM	SiCl4 MFC set to  50.000000
8/11/2010	2:26:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:26:16 PM	Tube furnace set to 1000
8/11/2010	2:38:16 PM	Helium valve closed
8/11/2010	2:38:16 PM	BCl3 valve closed
8/11/2010	2:38:16 PM	PH3 valve closed
8/11/2010	2:38:16 PM	SiCl4 pre valve closed
8/11/2010	2:38:16 PM	SiCl4 post valve closed
8/11/2010	2:38:16 PM	Main Vac valve closed
8/11/2010	2:38:16 PM	Bypass valve closed
8/11/2010	2:38:16 PM	H2 valve opened
8/11/2010	2:38:16 PM	Bubbler valve opened
8/11/2010	2:38:16 PM	Helium MFC set to  0.000000
8/11/2010	2:38:16 PM	H2 MFC set to  500.000000
8/11/2010	2:38:16 PM	BCl3 MFC set to  0.000000
8/11/2010	2:38:16 PM	PHl3 MFC set to  0.000000
8/11/2010	2:38:16 PM	SiCl4 MFC set to  0.000000
8/11/2010	2:38:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:38:17 PM	Tube furnace set to 750
8/11/2010	2:58:17 PM	H2 valve closed
8/11/2010	2:58:17 PM	BCl3 valve closed
8/11/2010	2:58:17 PM	PH3 valve closed
8/11/2010	2:58:17 PM	SiCl4 pre valve closed
8/11/2010	2:58:17 PM	SiCl4 post valve closed
8/11/2010	2:58:17 PM	Main Vac valve closed
8/11/2010	2:58:17 PM	Bypass valve closed
8/11/2010	2:58:17 PM	Helium valve opened
8/11/2010	2:58:17 PM	Bubbler valve opened
8/11/2010	2:58:17 PM	Helium MFC set to  500.000000
8/11/2010	2:58:17 PM	H2 MFC set to  0.000000
8/11/2010	2:58:17 PM	BCl3 MFC set to  0.000000
8/11/2010	2:58:17 PM	PHl3 MFC set to  0.000000
8/11/2010	2:58:17 PM	SiCl4 MFC set to  0.000000
8/11/2010	2:58:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	2:58:17 PM	Tube furnace set to 0
8/11/2010	3:14:02 PM	Helium valve closed
8/11/2010	3:14:02 PM	H2 valve closed
8/11/2010	3:14:02 PM	BCl3 valve closed
8/11/2010	3:14:02 PM	PH3 valve closed
8/11/2010	3:14:02 PM	SiCl4 pre valve closed
8/11/2010	3:14:02 PM	SiCl4 post valve closed
8/11/2010	3:14:02 PM	Main Vac valve closed
8/11/2010	3:14:02 PM	Bubbler valve closed
8/11/2010	3:14:02 PM	Bypass valve closed
8/11/2010	3:14:02 PM	Helium MFC set to  0.000000
8/11/2010	3:14:02 PM	H2 MFC set to  0.000000
8/11/2010	3:14:02 PM	BCl3 MFC set to  0.000000
8/11/2010	3:14:02 PM	PHl3 MFC set to  0.000000
8/11/2010	3:14:02 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:14:02 PM	Bypass solenoid MFC set to  760.000000
8/11/2010	3:14:03 PM	Tube furnace set to 0
8/11/2010	3:14:03 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
8/11/2010	3:14:08 PM	Run aborted at 3:14 PM
8/11/2010	3:14:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	3:14:10 PM	Recipe started at 3:14 PM
8/11/2010	3:14:10 PM	H2 valve closed
8/11/2010	3:14:10 PM	BCl3 valve closed
8/11/2010	3:14:10 PM	PH3 valve closed
8/11/2010	3:14:10 PM	SiCl4 pre valve closed
8/11/2010	3:14:10 PM	SiCl4 post valve closed
8/11/2010	3:14:10 PM	Main Vac valve closed
8/11/2010	3:14:10 PM	Bypass valve closed
8/11/2010	3:14:10 PM	Bubbler valve closed
8/11/2010	3:14:10 PM	Helium valve opened
8/11/2010	3:14:10 PM	Helium MFC set to  500.000000
8/11/2010	3:14:10 PM	H2 MFC set to  0.000000
8/11/2010	3:14:10 PM	BCl3 MFC set to  0.000000
8/11/2010	3:14:10 PM	PHl3 MFC set to  0.000000
8/11/2010	3:14:10 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:14:10 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:14:10 PM	Tube furnace set to 0
8/11/2010	3:14:15 PM	Helium valve closed
8/11/2010	3:14:15 PM	H2 valve closed
8/11/2010	3:14:15 PM	BCl3 valve closed
8/11/2010	3:14:15 PM	PH3 valve closed
8/11/2010	3:14:15 PM	SiCl4 pre valve closed
8/11/2010	3:14:15 PM	SiCl4 post valve closed
8/11/2010	3:14:15 PM	Main Vac valve closed
8/11/2010	3:14:15 PM	Bypass valve closed
8/11/2010	3:14:15 PM	Bubbler valve closed
8/11/2010	3:14:15 PM	Helium MFC set to  0.000000
8/11/2010	3:14:15 PM	H2 MFC set to  0.000000
8/11/2010	3:14:15 PM	BCl3 MFC set to  0.000000
8/11/2010	3:14:15 PM	PHl3 MFC set to  0.000000
8/11/2010	3:14:15 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:14:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:14:15 PM	Tube furnace set to 0
8/11/2010	3:14:15 PM	Run finished at 3:14 PM
8/11/2010	3:14:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	3:19:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	3:19:27 PM	Recipe started at 3:19 PM
8/11/2010	3:19:27 PM	Helium valve closed
8/11/2010	3:19:27 PM	H2 valve closed
8/11/2010	3:19:27 PM	BCl3 valve closed
8/11/2010	3:19:27 PM	PH3 valve closed
8/11/2010	3:19:27 PM	SiCl4 pre valve closed
8/11/2010	3:19:27 PM	SiCl4 post valve closed
8/11/2010	3:19:27 PM	Main Vac valve closed
8/11/2010	3:19:27 PM	Bubbler valve closed
8/11/2010	3:19:27 PM	Bypass valve opened
8/11/2010	3:19:27 PM	Helium MFC set to  0.000000
8/11/2010	3:19:27 PM	H2 MFC set to  0.000000
8/11/2010	3:19:27 PM	BCl3 MFC set to  0.000000
8/11/2010	3:19:27 PM	PHl3 MFC set to  0.000000
8/11/2010	3:19:27 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:19:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:19:27 PM	Tube furnace set to 0
8/11/2010	3:20:05 PM	Helium valve closed
8/11/2010	3:20:05 PM	H2 valve closed
8/11/2010	3:20:05 PM	BCl3 valve closed
8/11/2010	3:20:05 PM	PH3 valve closed
8/11/2010	3:20:05 PM	SiCl4 pre valve closed
8/11/2010	3:20:05 PM	SiCl4 post valve closed
8/11/2010	3:20:05 PM	Bubbler valve closed
8/11/2010	3:20:05 PM	Main Vac valve opened
8/11/2010	3:20:05 PM	Bypass valve opened
8/11/2010	3:20:05 PM	Helium MFC set to  0.000000
8/11/2010	3:20:05 PM	H2 MFC set to  0.000000
8/11/2010	3:20:05 PM	BCl3 MFC set to  0.000000
8/11/2010	3:20:05 PM	PHl3 MFC set to  0.000000
8/11/2010	3:20:05 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:20:05 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:20:05 PM	Tube furnace set to 0
8/11/2010	3:20:05 PM	Run finished at 3:20 PM
8/11/2010	3:20:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	3:20:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	3:20:28 PM	Recipe started at 3:20 PM
8/11/2010	3:20:28 PM	Helium valve closed
8/11/2010	3:20:28 PM	H2 valve closed
8/11/2010	3:20:28 PM	BCl3 valve closed
8/11/2010	3:20:28 PM	PH3 valve closed
8/11/2010	3:20:28 PM	SiCl4 pre valve closed
8/11/2010	3:20:28 PM	SiCl4 post valve closed
8/11/2010	3:20:28 PM	Main Vac valve closed
8/11/2010	3:20:28 PM	Bubbler valve closed
8/11/2010	3:20:28 PM	Bypass valve opened
8/11/2010	3:20:28 PM	Helium MFC set to  0.000000
8/11/2010	3:20:28 PM	H2 MFC set to  0.000000
8/11/2010	3:20:28 PM	BCl3 MFC set to  0.000000
8/11/2010	3:20:28 PM	PHl3 MFC set to  0.000000
8/11/2010	3:20:28 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:20:28 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:20:28 PM	Tube furnace set to 0
8/11/2010	3:20:29 PM	Helium valve closed
8/11/2010	3:20:29 PM	H2 valve closed
8/11/2010	3:20:29 PM	BCl3 valve closed
8/11/2010	3:20:29 PM	PH3 valve closed
8/11/2010	3:20:29 PM	SiCl4 pre valve closed
8/11/2010	3:20:29 PM	SiCl4 post valve closed
8/11/2010	3:20:29 PM	Bubbler valve closed
8/11/2010	3:20:29 PM	Main Vac valve opened
8/11/2010	3:20:29 PM	Bypass valve opened
8/11/2010	3:20:29 PM	Helium MFC set to  0.000000
8/11/2010	3:20:29 PM	H2 MFC set to  0.000000
8/11/2010	3:20:29 PM	BCl3 MFC set to  0.000000
8/11/2010	3:20:29 PM	PHl3 MFC set to  0.000000
8/11/2010	3:20:29 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:20:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:20:29 PM	Tube furnace set to 0
8/11/2010	3:21:29 PM	H2 valve closed
8/11/2010	3:21:29 PM	BCl3 valve closed
8/11/2010	3:21:29 PM	PH3 valve closed
8/11/2010	3:21:29 PM	SiCl4 pre valve closed
8/11/2010	3:21:29 PM	SiCl4 post valve closed
8/11/2010	3:21:29 PM	Bubbler valve closed
8/11/2010	3:21:29 PM	Helium valve opened
8/11/2010	3:21:29 PM	Main Vac valve opened
8/11/2010	3:21:29 PM	Bypass valve opened
8/11/2010	3:21:29 PM	Helium MFC set to  100.000000
8/11/2010	3:21:29 PM	H2 MFC set to  0.000000
8/11/2010	3:21:29 PM	BCl3 MFC set to  0.000000
8/11/2010	3:21:29 PM	PHl3 MFC set to  0.000000
8/11/2010	3:21:29 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:21:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:21:29 PM	Tube furnace set to 0
8/11/2010	3:30:29 PM	Helium valve closed
8/11/2010	3:30:29 PM	H2 valve closed
8/11/2010	3:30:29 PM	BCl3 valve closed
8/11/2010	3:30:29 PM	PH3 valve closed
8/11/2010	3:30:29 PM	SiCl4 pre valve closed
8/11/2010	3:30:29 PM	SiCl4 post valve closed
8/11/2010	3:30:29 PM	Bubbler valve closed
8/11/2010	3:30:29 PM	Main Vac valve opened
8/11/2010	3:30:29 PM	Bypass valve opened
8/11/2010	3:30:29 PM	Helium MFC set to  0.000000
8/11/2010	3:30:29 PM	H2 MFC set to  0.000000
8/11/2010	3:30:29 PM	BCl3 MFC set to  0.000000
8/11/2010	3:30:29 PM	PHl3 MFC set to  0.000000
8/11/2010	3:30:29 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:30:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:30:29 PM	Tube furnace set to 0
8/11/2010	3:31:29 PM	H2 valve closed
8/11/2010	3:31:29 PM	BCl3 valve closed
8/11/2010	3:31:29 PM	PH3 valve closed
8/11/2010	3:31:29 PM	SiCl4 pre valve closed
8/11/2010	3:31:29 PM	SiCl4 post valve closed
8/11/2010	3:31:29 PM	Bubbler valve closed
8/11/2010	3:31:29 PM	Helium valve opened
8/11/2010	3:31:29 PM	Main Vac valve opened
8/11/2010	3:31:29 PM	Bypass valve opened
8/11/2010	3:31:29 PM	Helium MFC set to  100.000000
8/11/2010	3:31:29 PM	H2 MFC set to  0.000000
8/11/2010	3:31:29 PM	BCl3 MFC set to  0.000000
8/11/2010	3:31:29 PM	PHl3 MFC set to  0.000000
8/11/2010	3:31:29 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:31:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:31:29 PM	Tube furnace set to 0
8/11/2010	3:40:29 PM	Helium valve closed
8/11/2010	3:40:29 PM	H2 valve closed
8/11/2010	3:40:29 PM	BCl3 valve closed
8/11/2010	3:40:29 PM	PH3 valve closed
8/11/2010	3:40:29 PM	SiCl4 pre valve closed
8/11/2010	3:40:29 PM	SiCl4 post valve closed
8/11/2010	3:40:29 PM	Bubbler valve closed
8/11/2010	3:40:29 PM	Main Vac valve opened
8/11/2010	3:40:29 PM	Bypass valve opened
8/11/2010	3:40:29 PM	Helium MFC set to  0.000000
8/11/2010	3:40:29 PM	H2 MFC set to  0.000000
8/11/2010	3:40:29 PM	BCl3 MFC set to  0.000000
8/11/2010	3:40:29 PM	PHl3 MFC set to  0.000000
8/11/2010	3:40:29 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:40:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:40:30 PM	Tube furnace set to 0
8/11/2010	3:41:30 PM	H2 valve closed
8/11/2010	3:41:30 PM	BCl3 valve closed
8/11/2010	3:41:30 PM	PH3 valve closed
8/11/2010	3:41:30 PM	SiCl4 pre valve closed
8/11/2010	3:41:30 PM	SiCl4 post valve closed
8/11/2010	3:41:30 PM	Bubbler valve closed
8/11/2010	3:41:30 PM	Helium valve opened
8/11/2010	3:41:30 PM	Main Vac valve opened
8/11/2010	3:41:30 PM	Bypass valve opened
8/11/2010	3:41:30 PM	Helium MFC set to  100.000000
8/11/2010	3:41:30 PM	H2 MFC set to  0.000000
8/11/2010	3:41:30 PM	BCl3 MFC set to  0.000000
8/11/2010	3:41:30 PM	PHl3 MFC set to  0.000000
8/11/2010	3:41:30 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:41:30 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:41:30 PM	Tube furnace set to 0
8/11/2010	3:50:30 PM	Helium valve closed
8/11/2010	3:50:30 PM	H2 valve closed
8/11/2010	3:50:30 PM	BCl3 valve closed
8/11/2010	3:50:30 PM	PH3 valve closed
8/11/2010	3:50:30 PM	SiCl4 pre valve closed
8/11/2010	3:50:30 PM	SiCl4 post valve closed
8/11/2010	3:50:30 PM	Bubbler valve closed
8/11/2010	3:50:30 PM	Main Vac valve opened
8/11/2010	3:50:30 PM	Bypass valve opened
8/11/2010	3:50:30 PM	Helium MFC set to  0.000000
8/11/2010	3:50:30 PM	H2 MFC set to  0.000000
8/11/2010	3:50:30 PM	BCl3 MFC set to  0.000000
8/11/2010	3:50:30 PM	PHl3 MFC set to  0.000000
8/11/2010	3:50:30 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:50:30 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:50:30 PM	Tube furnace set to 0
8/11/2010	3:50:31 PM	Run finished at 3:50 PM
8/11/2010	3:50:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	3:51:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	3:51:55 PM	Recipe started at 3:51 PM
8/11/2010	3:51:55 PM	Helium valve closed
8/11/2010	3:51:55 PM	H2 valve closed
8/11/2010	3:51:55 PM	BCl3 valve closed
8/11/2010	3:51:55 PM	PH3 valve closed
8/11/2010	3:51:55 PM	SiCl4 pre valve closed
8/11/2010	3:51:55 PM	SiCl4 post valve closed
8/11/2010	3:51:55 PM	Main Vac valve closed
8/11/2010	3:51:55 PM	Bubbler valve closed
8/11/2010	3:51:55 PM	Bypass valve opened
8/11/2010	3:51:55 PM	Helium MFC set to  0.000000
8/11/2010	3:51:55 PM	H2 MFC set to  0.000000
8/11/2010	3:51:55 PM	BCl3 MFC set to  0.000000
8/11/2010	3:51:55 PM	PHl3 MFC set to  0.000000
8/11/2010	3:51:55 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:51:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:51:55 PM	Tube furnace set to 0
8/11/2010	3:51:56 PM	Helium valve closed
8/11/2010	3:51:56 PM	H2 valve closed
8/11/2010	3:51:56 PM	BCl3 valve closed
8/11/2010	3:51:56 PM	PH3 valve closed
8/11/2010	3:51:56 PM	SiCl4 pre valve closed
8/11/2010	3:51:56 PM	SiCl4 post valve closed
8/11/2010	3:51:56 PM	Bubbler valve closed
8/11/2010	3:51:56 PM	Main Vac valve opened
8/11/2010	3:51:56 PM	Bypass valve opened
8/11/2010	3:51:56 PM	Helium MFC set to  0.000000
8/11/2010	3:51:56 PM	H2 MFC set to  0.000000
8/11/2010	3:51:56 PM	BCl3 MFC set to  0.000000
8/11/2010	3:51:56 PM	PHl3 MFC set to  0.000000
8/11/2010	3:51:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:51:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:51:56 PM	Tube furnace set to 0
8/11/2010	3:52:56 PM	H2 valve closed
8/11/2010	3:52:56 PM	BCl3 valve closed
8/11/2010	3:52:56 PM	PH3 valve closed
8/11/2010	3:52:56 PM	SiCl4 pre valve closed
8/11/2010	3:52:56 PM	SiCl4 post valve closed
8/11/2010	3:52:56 PM	Bubbler valve closed
8/11/2010	3:52:56 PM	Helium valve opened
8/11/2010	3:52:56 PM	Main Vac valve opened
8/11/2010	3:52:56 PM	Bypass valve opened
8/11/2010	3:52:56 PM	Helium MFC set to  100.000000
8/11/2010	3:52:56 PM	H2 MFC set to  0.000000
8/11/2010	3:52:56 PM	BCl3 MFC set to  0.000000
8/11/2010	3:52:56 PM	PHl3 MFC set to  0.000000
8/11/2010	3:52:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	3:52:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	3:52:56 PM	Tube furnace set to 0
8/11/2010	4:01:56 PM	Helium valve closed
8/11/2010	4:01:56 PM	H2 valve closed
8/11/2010	4:01:56 PM	BCl3 valve closed
8/11/2010	4:01:56 PM	PH3 valve closed
8/11/2010	4:01:56 PM	SiCl4 pre valve closed
8/11/2010	4:01:56 PM	SiCl4 post valve closed
8/11/2010	4:01:56 PM	Bubbler valve closed
8/11/2010	4:01:56 PM	Main Vac valve opened
8/11/2010	4:01:56 PM	Bypass valve opened
8/11/2010	4:01:56 PM	Helium MFC set to  0.000000
8/11/2010	4:01:56 PM	H2 MFC set to  0.000000
8/11/2010	4:01:56 PM	BCl3 MFC set to  0.000000
8/11/2010	4:01:56 PM	PHl3 MFC set to  0.000000
8/11/2010	4:01:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:01:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:01:56 PM	Tube furnace set to 0
8/11/2010	4:02:56 PM	H2 valve closed
8/11/2010	4:02:56 PM	BCl3 valve closed
8/11/2010	4:02:56 PM	PH3 valve closed
8/11/2010	4:02:56 PM	SiCl4 pre valve closed
8/11/2010	4:02:56 PM	SiCl4 post valve closed
8/11/2010	4:02:56 PM	Bubbler valve closed
8/11/2010	4:02:56 PM	Helium valve opened
8/11/2010	4:02:56 PM	Main Vac valve opened
8/11/2010	4:02:56 PM	Bypass valve opened
8/11/2010	4:02:56 PM	Helium MFC set to  100.000000
8/11/2010	4:02:56 PM	H2 MFC set to  0.000000
8/11/2010	4:02:56 PM	BCl3 MFC set to  0.000000
8/11/2010	4:02:56 PM	PHl3 MFC set to  0.000000
8/11/2010	4:02:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:02:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:02:56 PM	Tube furnace set to 0
8/11/2010	4:08:14 PM	Run aborted at 4:08 PM
8/11/2010	4:08:14 PM	Helium valve closed
8/11/2010	4:08:14 PM	H2 valve closed
8/11/2010	4:08:14 PM	BCl3 valve closed
8/11/2010	4:08:14 PM	PH3 valve closed
8/11/2010	4:08:14 PM	SiCl4 pre valve closed
8/11/2010	4:08:14 PM	SiCl4 post valve closed
8/11/2010	4:08:14 PM	Bypass valve closed
8/11/2010	4:08:14 PM	Main Vac valve closed
8/11/2010	4:08:14 PM	Bubbler valve closed
8/11/2010	4:08:14 PM	Helium MFC set to  0.000000
8/11/2010	4:08:14 PM	H2 MFC set to  0.000000
8/11/2010	4:08:14 PM	BCl3 MFC set to  0.000000
8/11/2010	4:08:14 PM	PHl3 MFC set to  0.000000
8/11/2010	4:08:14 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:08:14 PM	Tube furnace set to 0
8/11/2010	4:08:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	4:08:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	4:08:19 PM	Recipe started at 4:08 PM
8/11/2010	4:08:19 PM	Helium valve closed
8/11/2010	4:08:19 PM	H2 valve closed
8/11/2010	4:08:19 PM	BCl3 valve closed
8/11/2010	4:08:19 PM	PH3 valve closed
8/11/2010	4:08:19 PM	SiCl4 pre valve closed
8/11/2010	4:08:19 PM	SiCl4 post valve closed
8/11/2010	4:08:19 PM	Main Vac valve closed
8/11/2010	4:08:19 PM	Bubbler valve closed
8/11/2010	4:08:19 PM	Bypass valve opened
8/11/2010	4:08:19 PM	Helium MFC set to  0.000000
8/11/2010	4:08:19 PM	H2 MFC set to  0.000000
8/11/2010	4:08:19 PM	BCl3 MFC set to  0.000000
8/11/2010	4:08:19 PM	PHl3 MFC set to  0.000000
8/11/2010	4:08:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:08:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:08:19 PM	Tube furnace set to 0
8/11/2010	4:08:19 PM	Helium valve closed
8/11/2010	4:08:19 PM	H2 valve closed
8/11/2010	4:08:19 PM	BCl3 valve closed
8/11/2010	4:08:19 PM	PH3 valve closed
8/11/2010	4:08:19 PM	SiCl4 pre valve closed
8/11/2010	4:08:19 PM	SiCl4 post valve closed
8/11/2010	4:08:19 PM	Bubbler valve closed
8/11/2010	4:08:19 PM	Main Vac valve opened
8/11/2010	4:08:19 PM	Bypass valve opened
8/11/2010	4:08:19 PM	Helium MFC set to  0.000000
8/11/2010	4:08:19 PM	H2 MFC set to  0.000000
8/11/2010	4:08:19 PM	BCl3 MFC set to  0.000000
8/11/2010	4:08:19 PM	PHl3 MFC set to  0.000000
8/11/2010	4:08:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:08:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:08:19 PM	Tube furnace set to 0
8/11/2010	4:09:19 PM	H2 valve closed
8/11/2010	4:09:19 PM	BCl3 valve closed
8/11/2010	4:09:19 PM	PH3 valve closed
8/11/2010	4:09:19 PM	SiCl4 pre valve closed
8/11/2010	4:09:19 PM	SiCl4 post valve closed
8/11/2010	4:09:19 PM	Bubbler valve closed
8/11/2010	4:09:19 PM	Helium valve opened
8/11/2010	4:09:19 PM	Main Vac valve opened
8/11/2010	4:09:19 PM	Bypass valve opened
8/11/2010	4:09:19 PM	Helium MFC set to  100.000000
8/11/2010	4:09:19 PM	H2 MFC set to  0.000000
8/11/2010	4:09:19 PM	BCl3 MFC set to  0.000000
8/11/2010	4:09:19 PM	PHl3 MFC set to  0.000000
8/11/2010	4:09:19 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:09:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:09:20 PM	Tube furnace set to 0
8/11/2010	4:15:32 PM	Run aborted at 4:15 PM
8/11/2010	4:15:32 PM	Helium valve closed
8/11/2010	4:15:32 PM	H2 valve closed
8/11/2010	4:15:32 PM	BCl3 valve closed
8/11/2010	4:15:32 PM	PH3 valve closed
8/11/2010	4:15:32 PM	SiCl4 pre valve closed
8/11/2010	4:15:32 PM	SiCl4 post valve closed
8/11/2010	4:15:32 PM	Bypass valve closed
8/11/2010	4:15:32 PM	Main Vac valve closed
8/11/2010	4:15:32 PM	Bubbler valve closed
8/11/2010	4:15:32 PM	Helium MFC set to  0.000000
8/11/2010	4:15:32 PM	H2 MFC set to  0.000000
8/11/2010	4:15:32 PM	BCl3 MFC set to  0.000000
8/11/2010	4:15:32 PM	PHl3 MFC set to  0.000000
8/11/2010	4:15:32 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:15:32 PM	Tube furnace set to 0
8/11/2010	4:15:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	4:15:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	4:15:33 PM	Recipe started at 4:15 PM
8/11/2010	4:15:33 PM	Helium valve closed
8/11/2010	4:15:33 PM	H2 valve closed
8/11/2010	4:15:33 PM	BCl3 valve closed
8/11/2010	4:15:33 PM	PH3 valve closed
8/11/2010	4:15:33 PM	SiCl4 pre valve closed
8/11/2010	4:15:33 PM	SiCl4 post valve closed
8/11/2010	4:15:33 PM	Main Vac valve closed
8/11/2010	4:15:33 PM	Bubbler valve closed
8/11/2010	4:15:33 PM	Bypass valve opened
8/11/2010	4:15:33 PM	Helium MFC set to  0.000000
8/11/2010	4:15:33 PM	H2 MFC set to  0.000000
8/11/2010	4:15:33 PM	BCl3 MFC set to  0.000000
8/11/2010	4:15:33 PM	PHl3 MFC set to  0.000000
8/11/2010	4:15:33 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:15:33 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:15:33 PM	Tube furnace set to 0
8/11/2010	4:15:34 PM	Helium valve closed
8/11/2010	4:15:34 PM	H2 valve closed
8/11/2010	4:15:34 PM	BCl3 valve closed
8/11/2010	4:15:34 PM	PH3 valve closed
8/11/2010	4:15:34 PM	SiCl4 pre valve closed
8/11/2010	4:15:34 PM	SiCl4 post valve closed
8/11/2010	4:15:34 PM	Bubbler valve closed
8/11/2010	4:15:34 PM	Main Vac valve opened
8/11/2010	4:15:34 PM	Bypass valve opened
8/11/2010	4:15:34 PM	Helium MFC set to  0.000000
8/11/2010	4:15:34 PM	H2 MFC set to  0.000000
8/11/2010	4:15:34 PM	BCl3 MFC set to  0.000000
8/11/2010	4:15:34 PM	PHl3 MFC set to  0.000000
8/11/2010	4:15:34 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:15:34 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:15:34 PM	Tube furnace set to 0
8/11/2010	4:15:34 PM	Run finished at 4:15 PM
8/11/2010	4:15:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	4:16:18 PM	Recipe started at 4:16 PM
8/11/2010	4:16:18 PM	Helium valve closed
8/11/2010	4:16:18 PM	BCl3 valve closed
8/11/2010	4:16:18 PM	PH3 valve closed
8/11/2010	4:16:18 PM	SiCl4 pre valve closed
8/11/2010	4:16:18 PM	SiCl4 post valve closed
8/11/2010	4:16:18 PM	Main Vac valve closed
8/11/2010	4:16:18 PM	Bypass valve closed
8/11/2010	4:16:18 PM	Bubbler valve closed
8/11/2010	4:16:18 PM	H2 valve opened
8/11/2010	4:16:18 PM	Helium MFC set to  0.000000
8/11/2010	4:16:18 PM	H2 MFC set to  500.000000
8/11/2010	4:16:18 PM	BCl3 MFC set to  0.000000
8/11/2010	4:16:18 PM	PHl3 MFC set to  0.000000
8/11/2010	4:16:18 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:16:18 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:16:18 PM	Tube furnace set to 1000
8/11/2010	4:17:40 PM	Helium valve closed
8/11/2010	4:17:40 PM	BCl3 valve closed
8/11/2010	4:17:40 PM	PH3 valve closed
8/11/2010	4:17:40 PM	SiCl4 pre valve closed
8/11/2010	4:17:40 PM	SiCl4 post valve closed
8/11/2010	4:17:40 PM	Main Vac valve closed
8/11/2010	4:17:40 PM	Bypass valve closed
8/11/2010	4:17:40 PM	H2 valve opened
8/11/2010	4:17:40 PM	Bubbler valve opened
8/11/2010	4:17:40 PM	Helium MFC set to  0.000000
8/11/2010	4:17:40 PM	H2 MFC set to  500.000000
8/11/2010	4:17:40 PM	BCl3 MFC set to  0.000000
8/11/2010	4:17:40 PM	PHl3 MFC set to  0.000000
8/11/2010	4:17:40 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:17:40 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:17:41 PM	Tube furnace set to 1000
8/11/2010	4:37:41 PM	Helium valve closed
8/11/2010	4:37:41 PM	PH3 valve closed
8/11/2010	4:37:41 PM	Main Vac valve closed
8/11/2010	4:37:41 PM	Bypass valve closed
8/11/2010	4:37:41 PM	H2 valve opened
8/11/2010	4:37:41 PM	BCl3 valve opened
8/11/2010	4:37:41 PM	SiCl4 pre valve opened
8/11/2010	4:37:41 PM	SiCl4 post valve opened
8/11/2010	4:37:41 PM	Bubbler valve opened
8/11/2010	4:37:41 PM	Helium MFC set to  0.000000
8/11/2010	4:37:41 PM	H2 MFC set to  500.000000
8/11/2010	4:37:41 PM	BCl3 MFC set to  35.000000
8/11/2010	4:37:41 PM	PHl3 MFC set to  0.000000
8/11/2010	4:37:41 PM	SiCl4 MFC set to  50.000000
8/11/2010	4:37:41 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:37:41 PM	Tube furnace set to 1000
8/11/2010	4:49:41 PM	Helium valve closed
8/11/2010	4:49:41 PM	BCl3 valve closed
8/11/2010	4:49:41 PM	PH3 valve closed
8/11/2010	4:49:41 PM	SiCl4 pre valve closed
8/11/2010	4:49:41 PM	SiCl4 post valve closed
8/11/2010	4:49:41 PM	Main Vac valve closed
8/11/2010	4:49:41 PM	Bypass valve closed
8/11/2010	4:49:41 PM	H2 valve opened
8/11/2010	4:49:41 PM	Bubbler valve opened
8/11/2010	4:49:41 PM	Helium MFC set to  0.000000
8/11/2010	4:49:41 PM	H2 MFC set to  500.000000
8/11/2010	4:49:41 PM	BCl3 MFC set to  0.000000
8/11/2010	4:49:41 PM	PHl3 MFC set to  0.000000
8/11/2010	4:49:41 PM	SiCl4 MFC set to  0.000000
8/11/2010	4:49:41 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	4:49:41 PM	Tube furnace set to 750
8/11/2010	5:09:41 PM	H2 valve closed
8/11/2010	5:09:41 PM	BCl3 valve closed
8/11/2010	5:09:41 PM	PH3 valve closed
8/11/2010	5:09:41 PM	SiCl4 pre valve closed
8/11/2010	5:09:41 PM	SiCl4 post valve closed
8/11/2010	5:09:41 PM	Main Vac valve closed
8/11/2010	5:09:41 PM	Bypass valve closed
8/11/2010	5:09:41 PM	Helium valve opened
8/11/2010	5:09:41 PM	Bubbler valve opened
8/11/2010	5:09:41 PM	Helium MFC set to  500.000000
8/11/2010	5:09:41 PM	H2 MFC set to  0.000000
8/11/2010	5:09:41 PM	BCl3 MFC set to  0.000000
8/11/2010	5:09:41 PM	PHl3 MFC set to  0.000000
8/11/2010	5:09:41 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:09:41 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:09:41 PM	Tube furnace set to 0
8/11/2010	5:28:26 PM	Helium valve closed
8/11/2010	5:28:26 PM	H2 valve closed
8/11/2010	5:28:26 PM	BCl3 valve closed
8/11/2010	5:28:26 PM	PH3 valve closed
8/11/2010	5:28:26 PM	SiCl4 pre valve closed
8/11/2010	5:28:26 PM	SiCl4 post valve closed
8/11/2010	5:28:27 PM	Main Vac valve closed
8/11/2010	5:28:27 PM	Bypass valve closed
8/11/2010	5:28:27 PM	Bubbler valve closed
8/11/2010	5:28:27 PM	Helium MFC set to  0.000000
8/11/2010	5:28:27 PM	H2 MFC set to  0.000000
8/11/2010	5:28:27 PM	BCl3 MFC set to  0.000000
8/11/2010	5:28:27 PM	PHl3 MFC set to  0.000000
8/11/2010	5:28:27 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:28:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:28:27 PM	Tube furnace set to 0
8/11/2010	5:28:27 PM	Run finished at 5:28 PM
8/11/2010	5:28:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:28:30 PM	Recipe started at 5:28 PM
8/11/2010	5:28:30 PM	H2 valve closed
8/11/2010	5:28:30 PM	BCl3 valve closed
8/11/2010	5:28:30 PM	PH3 valve closed
8/11/2010	5:28:30 PM	SiCl4 pre valve closed
8/11/2010	5:28:30 PM	SiCl4 post valve closed
8/11/2010	5:28:30 PM	Main Vac valve closed
8/11/2010	5:28:30 PM	Bypass valve closed
8/11/2010	5:28:30 PM	Bubbler valve closed
8/11/2010	5:28:30 PM	Helium valve opened
8/11/2010	5:28:31 PM	Helium MFC set to  500.000000
8/11/2010	5:28:31 PM	H2 MFC set to  0.000000
8/11/2010	5:28:31 PM	BCl3 MFC set to  0.000000
8/11/2010	5:28:31 PM	PHl3 MFC set to  0.000000
8/11/2010	5:28:31 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:28:31 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:28:31 PM	Tube furnace set to 0
8/11/2010	5:28:31 PM	Helium valve closed
8/11/2010	5:28:31 PM	H2 valve closed
8/11/2010	5:28:31 PM	BCl3 valve closed
8/11/2010	5:28:31 PM	PH3 valve closed
8/11/2010	5:28:31 PM	SiCl4 pre valve closed
8/11/2010	5:28:31 PM	SiCl4 post valve closed
8/11/2010	5:28:31 PM	Main Vac valve closed
8/11/2010	5:28:31 PM	Bypass valve closed
8/11/2010	5:28:31 PM	Bubbler valve closed
8/11/2010	5:28:31 PM	Helium MFC set to  0.000000
8/11/2010	5:28:31 PM	H2 MFC set to  0.000000
8/11/2010	5:28:31 PM	BCl3 MFC set to  0.000000
8/11/2010	5:28:31 PM	PHl3 MFC set to  0.000000
8/11/2010	5:28:31 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:28:31 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:28:31 PM	Tube furnace set to 0
8/11/2010	5:28:31 PM	Run finished at 5:28 PM
8/11/2010	5:28:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:28:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:28:41 PM	Recipe started at 5:28 PM
8/11/2010	5:28:41 PM	H2 valve closed
8/11/2010	5:28:41 PM	BCl3 valve closed
8/11/2010	5:28:41 PM	PH3 valve closed
8/11/2010	5:28:41 PM	SiCl4 pre valve closed
8/11/2010	5:28:41 PM	SiCl4 post valve closed
8/11/2010	5:28:41 PM	Main Vac valve closed
8/11/2010	5:28:41 PM	Bypass valve closed
8/11/2010	5:28:41 PM	Bubbler valve closed
8/11/2010	5:28:41 PM	Helium valve opened
8/11/2010	5:28:41 PM	Helium MFC set to  500.000000
8/11/2010	5:28:41 PM	H2 MFC set to  0.000000
8/11/2010	5:28:41 PM	BCl3 MFC set to  0.000000
8/11/2010	5:28:41 PM	PHl3 MFC set to  0.000000
8/11/2010	5:28:41 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:28:41 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:28:41 PM	Tube furnace set to 0
8/11/2010	5:28:42 PM	Helium valve closed
8/11/2010	5:28:42 PM	H2 valve closed
8/11/2010	5:28:42 PM	BCl3 valve closed
8/11/2010	5:28:42 PM	PH3 valve closed
8/11/2010	5:28:42 PM	SiCl4 pre valve closed
8/11/2010	5:28:42 PM	SiCl4 post valve closed
8/11/2010	5:28:42 PM	Main Vac valve closed
8/11/2010	5:28:42 PM	Bypass valve closed
8/11/2010	5:28:42 PM	Bubbler valve closed
8/11/2010	5:28:42 PM	Helium MFC set to  0.000000
8/11/2010	5:28:42 PM	H2 MFC set to  0.000000
8/11/2010	5:28:42 PM	BCl3 MFC set to  0.000000
8/11/2010	5:28:42 PM	PHl3 MFC set to  0.000000
8/11/2010	5:28:42 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:28:42 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:28:42 PM	Tube furnace set to 0
8/11/2010	5:28:42 PM	Run finished at 5:28 PM
8/11/2010	5:28:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:33:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:33:01 PM	Recipe started at 5:33 PM
8/11/2010	5:33:01 PM	H2 valve closed
8/11/2010	5:33:01 PM	BCl3 valve closed
8/11/2010	5:33:01 PM	PH3 valve closed
8/11/2010	5:33:01 PM	SiCl4 pre valve closed
8/11/2010	5:33:01 PM	SiCl4 post valve closed
8/11/2010	5:33:01 PM	Main Vac valve closed
8/11/2010	5:33:01 PM	Bypass valve closed
8/11/2010	5:33:01 PM	Bubbler valve closed
8/11/2010	5:33:01 PM	Helium valve opened
8/11/2010	5:33:01 PM	Helium MFC set to  500.000000
8/11/2010	5:33:01 PM	H2 MFC set to  0.000000
8/11/2010	5:33:01 PM	BCl3 MFC set to  0.000000
8/11/2010	5:33:01 PM	PHl3 MFC set to  0.000000
8/11/2010	5:33:01 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:33:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:33:01 PM	Tube furnace set to 0
8/11/2010	5:33:04 PM	Helium valve closed
8/11/2010	5:33:04 PM	H2 valve closed
8/11/2010	5:33:04 PM	BCl3 valve closed
8/11/2010	5:33:04 PM	PH3 valve closed
8/11/2010	5:33:04 PM	SiCl4 pre valve closed
8/11/2010	5:33:04 PM	SiCl4 post valve closed
8/11/2010	5:33:04 PM	Main Vac valve closed
8/11/2010	5:33:04 PM	Bypass valve closed
8/11/2010	5:33:04 PM	Bubbler valve closed
8/11/2010	5:33:04 PM	Helium MFC set to  0.000000
8/11/2010	5:33:04 PM	H2 MFC set to  0.000000
8/11/2010	5:33:04 PM	BCl3 MFC set to  0.000000
8/11/2010	5:33:04 PM	PHl3 MFC set to  0.000000
8/11/2010	5:33:04 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:33:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:33:04 PM	Tube furnace set to 0
8/11/2010	5:33:04 PM	Run finished at 5:33 PM
8/11/2010	5:33:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	5:36:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	5:36:50 PM	Recipe started at 5:36 PM
8/11/2010	5:36:50 PM	Helium valve closed
8/11/2010	5:36:50 PM	H2 valve closed
8/11/2010	5:36:50 PM	BCl3 valve closed
8/11/2010	5:36:50 PM	PH3 valve closed
8/11/2010	5:36:50 PM	SiCl4 pre valve closed
8/11/2010	5:36:50 PM	SiCl4 post valve closed
8/11/2010	5:36:50 PM	Main Vac valve closed
8/11/2010	5:36:50 PM	Bubbler valve closed
8/11/2010	5:36:50 PM	Bypass valve opened
8/11/2010	5:36:50 PM	Helium MFC set to  0.000000
8/11/2010	5:36:50 PM	H2 MFC set to  0.000000
8/11/2010	5:36:50 PM	BCl3 MFC set to  0.000000
8/11/2010	5:36:50 PM	PHl3 MFC set to  0.000000
8/11/2010	5:36:50 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:36:50 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:36:50 PM	Tube furnace set to 0
8/11/2010	5:37:27 PM	Helium valve closed
8/11/2010	5:37:27 PM	H2 valve closed
8/11/2010	5:37:27 PM	BCl3 valve closed
8/11/2010	5:37:27 PM	PH3 valve closed
8/11/2010	5:37:27 PM	SiCl4 pre valve closed
8/11/2010	5:37:27 PM	SiCl4 post valve closed
8/11/2010	5:37:27 PM	Bubbler valve closed
8/11/2010	5:37:27 PM	Main Vac valve opened
8/11/2010	5:37:27 PM	Bypass valve opened
8/11/2010	5:37:27 PM	Helium MFC set to  0.000000
8/11/2010	5:37:27 PM	H2 MFC set to  0.000000
8/11/2010	5:37:27 PM	BCl3 MFC set to  0.000000
8/11/2010	5:37:27 PM	PHl3 MFC set to  0.000000
8/11/2010	5:37:27 PM	SiCl4 MFC set to  0.000000
8/11/2010	5:37:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	5:37:28 PM	Tube furnace set to 0
8/11/2010	5:37:28 PM	Run finished at 5:37 PM
8/11/2010	5:37:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	6:05:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	6:05:47 PM	Recipe started at 6:05 PM
8/11/2010	6:05:47 PM	Helium valve closed
8/11/2010	6:05:47 PM	H2 valve closed
8/11/2010	6:05:47 PM	BCl3 valve closed
8/11/2010	6:05:47 PM	PH3 valve closed
8/11/2010	6:05:47 PM	SiCl4 pre valve closed
8/11/2010	6:05:47 PM	SiCl4 post valve closed
8/11/2010	6:05:47 PM	Main Vac valve closed
8/11/2010	6:05:47 PM	Bubbler valve closed
8/11/2010	6:05:47 PM	Bypass valve opened
8/11/2010	6:05:47 PM	Helium MFC set to  0.000000
8/11/2010	6:05:47 PM	H2 MFC set to  0.000000
8/11/2010	6:05:47 PM	BCl3 MFC set to  0.000000
8/11/2010	6:05:47 PM	PHl3 MFC set to  0.000000
8/11/2010	6:05:47 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:05:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:05:47 PM	Tube furnace set to 0
8/11/2010	6:05:47 PM	Helium valve closed
8/11/2010	6:05:47 PM	H2 valve closed
8/11/2010	6:05:47 PM	BCl3 valve closed
8/11/2010	6:05:47 PM	PH3 valve closed
8/11/2010	6:05:47 PM	SiCl4 pre valve closed
8/11/2010	6:05:47 PM	SiCl4 post valve closed
8/11/2010	6:05:47 PM	Bubbler valve closed
8/11/2010	6:05:47 PM	Main Vac valve opened
8/11/2010	6:05:47 PM	Bypass valve opened
8/11/2010	6:05:47 PM	Helium MFC set to  0.000000
8/11/2010	6:05:47 PM	H2 MFC set to  0.000000
8/11/2010	6:05:47 PM	BCl3 MFC set to  0.000000
8/11/2010	6:05:47 PM	PHl3 MFC set to  0.000000
8/11/2010	6:05:47 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:05:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:05:47 PM	Tube furnace set to 0
8/11/2010	6:06:47 PM	H2 valve closed
8/11/2010	6:06:47 PM	BCl3 valve closed
8/11/2010	6:06:47 PM	PH3 valve closed
8/11/2010	6:06:47 PM	SiCl4 pre valve closed
8/11/2010	6:06:47 PM	SiCl4 post valve closed
8/11/2010	6:06:47 PM	Bubbler valve closed
8/11/2010	6:06:47 PM	Helium valve opened
8/11/2010	6:06:47 PM	Main Vac valve opened
8/11/2010	6:06:47 PM	Bypass valve opened
8/11/2010	6:06:47 PM	Helium MFC set to  100.000000
8/11/2010	6:06:47 PM	H2 MFC set to  0.000000
8/11/2010	6:06:47 PM	BCl3 MFC set to  0.000000
8/11/2010	6:06:47 PM	PHl3 MFC set to  0.000000
8/11/2010	6:06:47 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:06:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:06:48 PM	Tube furnace set to 0
8/11/2010	6:15:48 PM	Helium valve closed
8/11/2010	6:15:48 PM	H2 valve closed
8/11/2010	6:15:48 PM	BCl3 valve closed
8/11/2010	6:15:48 PM	PH3 valve closed
8/11/2010	6:15:48 PM	SiCl4 pre valve closed
8/11/2010	6:15:48 PM	SiCl4 post valve closed
8/11/2010	6:15:48 PM	Bubbler valve closed
8/11/2010	6:15:48 PM	Main Vac valve opened
8/11/2010	6:15:48 PM	Bypass valve opened
8/11/2010	6:15:48 PM	Helium MFC set to  0.000000
8/11/2010	6:15:48 PM	H2 MFC set to  0.000000
8/11/2010	6:15:48 PM	BCl3 MFC set to  0.000000
8/11/2010	6:15:48 PM	PHl3 MFC set to  0.000000
8/11/2010	6:15:48 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:15:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:15:48 PM	Tube furnace set to 0
8/11/2010	6:16:48 PM	H2 valve closed
8/11/2010	6:16:48 PM	BCl3 valve closed
8/11/2010	6:16:48 PM	PH3 valve closed
8/11/2010	6:16:48 PM	SiCl4 pre valve closed
8/11/2010	6:16:48 PM	SiCl4 post valve closed
8/11/2010	6:16:48 PM	Bubbler valve closed
8/11/2010	6:16:48 PM	Helium valve opened
8/11/2010	6:16:48 PM	Main Vac valve opened
8/11/2010	6:16:48 PM	Bypass valve opened
8/11/2010	6:16:48 PM	Helium MFC set to  100.000000
8/11/2010	6:16:48 PM	H2 MFC set to  0.000000
8/11/2010	6:16:48 PM	BCl3 MFC set to  0.000000
8/11/2010	6:16:48 PM	PHl3 MFC set to  0.000000
8/11/2010	6:16:48 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:16:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:16:48 PM	Tube furnace set to 0
8/11/2010	6:25:48 PM	Helium valve closed
8/11/2010	6:25:48 PM	H2 valve closed
8/11/2010	6:25:48 PM	BCl3 valve closed
8/11/2010	6:25:48 PM	PH3 valve closed
8/11/2010	6:25:48 PM	SiCl4 pre valve closed
8/11/2010	6:25:48 PM	SiCl4 post valve closed
8/11/2010	6:25:48 PM	Bubbler valve closed
8/11/2010	6:25:48 PM	Main Vac valve opened
8/11/2010	6:25:48 PM	Bypass valve opened
8/11/2010	6:25:48 PM	Helium MFC set to  0.000000
8/11/2010	6:25:48 PM	H2 MFC set to  0.000000
8/11/2010	6:25:48 PM	BCl3 MFC set to  0.000000
8/11/2010	6:25:48 PM	PHl3 MFC set to  0.000000
8/11/2010	6:25:48 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:25:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:25:48 PM	Tube furnace set to 0
8/11/2010	6:26:48 PM	H2 valve closed
8/11/2010	6:26:48 PM	BCl3 valve closed
8/11/2010	6:26:48 PM	PH3 valve closed
8/11/2010	6:26:48 PM	SiCl4 pre valve closed
8/11/2010	6:26:48 PM	SiCl4 post valve closed
8/11/2010	6:26:48 PM	Bubbler valve closed
8/11/2010	6:26:48 PM	Helium valve opened
8/11/2010	6:26:48 PM	Main Vac valve opened
8/11/2010	6:26:48 PM	Bypass valve opened
8/11/2010	6:26:48 PM	Helium MFC set to  100.000000
8/11/2010	6:26:48 PM	H2 MFC set to  0.000000
8/11/2010	6:26:48 PM	BCl3 MFC set to  0.000000
8/11/2010	6:26:48 PM	PHl3 MFC set to  0.000000
8/11/2010	6:26:48 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:26:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:26:48 PM	Tube furnace set to 0
8/11/2010	6:30:51 PM	Helium valve closed
8/11/2010	6:30:51 PM	H2 valve closed
8/11/2010	6:30:51 PM	BCl3 valve closed
8/11/2010	6:30:51 PM	PH3 valve closed
8/11/2010	6:30:51 PM	SiCl4 pre valve closed
8/11/2010	6:30:51 PM	SiCl4 post valve closed
8/11/2010	6:30:51 PM	Bubbler valve closed
8/11/2010	6:30:51 PM	Main Vac valve opened
8/11/2010	6:30:51 PM	Bypass valve opened
8/11/2010	6:30:51 PM	Helium MFC set to  0.000000
8/11/2010	6:30:51 PM	H2 MFC set to  0.000000
8/11/2010	6:30:51 PM	BCl3 MFC set to  0.000000
8/11/2010	6:30:51 PM	PHl3 MFC set to  0.000000
8/11/2010	6:30:51 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:30:51 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:30:51 PM	Tube furnace set to 0
8/11/2010	6:30:52 PM	Run finished at 6:30 PM
8/11/2010	6:30:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	6:31:39 PM	Helium MFC set to  100.000000
8/11/2010	6:31:41 PM	Helium valve opened
8/11/2010	6:34:32 PM	Helium valve closed
8/11/2010	6:34:34 PM	Helium MFC set to  0.000000
8/11/2010	6:35:18 PM	Recipe started at 6:35 PM
8/11/2010	6:35:18 PM	Helium valve closed
8/11/2010	6:35:18 PM	BCl3 valve closed
8/11/2010	6:35:18 PM	PH3 valve closed
8/11/2010	6:35:18 PM	SiCl4 pre valve closed
8/11/2010	6:35:18 PM	SiCl4 post valve closed
8/11/2010	6:35:18 PM	Main Vac valve closed
8/11/2010	6:35:18 PM	Bypass valve closed
8/11/2010	6:35:18 PM	Bubbler valve closed
8/11/2010	6:35:18 PM	H2 valve opened
8/11/2010	6:35:18 PM	Helium MFC set to  0.000000
8/11/2010	6:35:18 PM	H2 MFC set to  500.000000
8/11/2010	6:35:18 PM	BCl3 MFC set to  0.000000
8/11/2010	6:35:18 PM	PHl3 MFC set to  0.000000
8/11/2010	6:35:18 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:35:18 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:35:18 PM	Tube furnace set to 1000
8/11/2010	6:36:37 PM	Helium valve closed
8/11/2010	6:36:37 PM	BCl3 valve closed
8/11/2010	6:36:37 PM	PH3 valve closed
8/11/2010	6:36:37 PM	SiCl4 pre valve closed
8/11/2010	6:36:37 PM	SiCl4 post valve closed
8/11/2010	6:36:37 PM	Main Vac valve closed
8/11/2010	6:36:37 PM	Bypass valve closed
8/11/2010	6:36:37 PM	H2 valve opened
8/11/2010	6:36:37 PM	Bubbler valve opened
8/11/2010	6:36:37 PM	Helium MFC set to  0.000000
8/11/2010	6:36:37 PM	H2 MFC set to  500.000000
8/11/2010	6:36:37 PM	BCl3 MFC set to  0.000000
8/11/2010	6:36:37 PM	PHl3 MFC set to  0.000000
8/11/2010	6:36:37 PM	SiCl4 MFC set to  0.000000
8/11/2010	6:36:37 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:36:37 PM	Tube furnace set to 1000
8/11/2010	6:56:37 PM	Helium valve closed
8/11/2010	6:56:37 PM	PH3 valve closed
8/11/2010	6:56:37 PM	Main Vac valve closed
8/11/2010	6:56:37 PM	Bypass valve closed
8/11/2010	6:56:37 PM	H2 valve opened
8/11/2010	6:56:37 PM	BCl3 valve opened
8/11/2010	6:56:37 PM	SiCl4 pre valve opened
8/11/2010	6:56:37 PM	SiCl4 post valve opened
8/11/2010	6:56:37 PM	Bubbler valve opened
8/11/2010	6:56:37 PM	Helium MFC set to  0.000000
8/11/2010	6:56:37 PM	H2 MFC set to  500.000000
8/11/2010	6:56:37 PM	BCl3 MFC set to  35.000000
8/11/2010	6:56:37 PM	PHl3 MFC set to  0.000000
8/11/2010	6:56:37 PM	SiCl4 MFC set to  50.000000
8/11/2010	6:56:37 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	6:56:37 PM	Tube furnace set to 1000
8/11/2010	7:08:38 PM	Helium valve closed
8/11/2010	7:08:38 PM	BCl3 valve closed
8/11/2010	7:08:38 PM	PH3 valve closed
8/11/2010	7:08:38 PM	SiCl4 pre valve closed
8/11/2010	7:08:38 PM	SiCl4 post valve closed
8/11/2010	7:08:38 PM	Main Vac valve closed
8/11/2010	7:08:38 PM	Bypass valve closed
8/11/2010	7:08:38 PM	H2 valve opened
8/11/2010	7:08:38 PM	Bubbler valve opened
8/11/2010	7:08:38 PM	Helium MFC set to  0.000000
8/11/2010	7:08:38 PM	H2 MFC set to  500.000000
8/11/2010	7:08:38 PM	BCl3 MFC set to  0.000000
8/11/2010	7:08:38 PM	PHl3 MFC set to  0.000000
8/11/2010	7:08:38 PM	SiCl4 MFC set to  0.000000
8/11/2010	7:08:38 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	7:08:38 PM	Tube furnace set to 750
8/11/2010	7:28:38 PM	H2 valve closed
8/11/2010	7:28:38 PM	BCl3 valve closed
8/11/2010	7:28:38 PM	PH3 valve closed
8/11/2010	7:28:38 PM	SiCl4 pre valve closed
8/11/2010	7:28:38 PM	SiCl4 post valve closed
8/11/2010	7:28:38 PM	Main Vac valve closed
8/11/2010	7:28:38 PM	Bypass valve closed
8/11/2010	7:28:38 PM	Helium valve opened
8/11/2010	7:28:38 PM	Bubbler valve opened
8/11/2010	7:28:38 PM	Helium MFC set to  500.000000
8/11/2010	7:28:38 PM	H2 MFC set to  0.000000
8/11/2010	7:28:38 PM	BCl3 MFC set to  0.000000
8/11/2010	7:28:38 PM	PHl3 MFC set to  0.000000
8/11/2010	7:28:38 PM	SiCl4 MFC set to  0.000000
8/11/2010	7:28:38 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	7:28:38 PM	Tube furnace set to 0
8/11/2010	7:48:38 PM	Helium valve closed
8/11/2010	7:48:38 PM	H2 valve closed
8/11/2010	7:48:38 PM	BCl3 valve closed
8/11/2010	7:48:38 PM	PH3 valve closed
8/11/2010	7:48:38 PM	SiCl4 pre valve closed
8/11/2010	7:48:38 PM	SiCl4 post valve closed
8/11/2010	7:48:38 PM	Main Vac valve closed
8/11/2010	7:48:38 PM	Bypass valve closed
8/11/2010	7:48:38 PM	Bubbler valve closed
8/11/2010	7:48:38 PM	Helium MFC set to  0.000000
8/11/2010	7:48:38 PM	H2 MFC set to  0.000000
8/11/2010	7:48:38 PM	BCl3 MFC set to  0.000000
8/11/2010	7:48:38 PM	PHl3 MFC set to  0.000000
8/11/2010	7:48:38 PM	SiCl4 MFC set to  0.000000
8/11/2010	7:48:38 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	7:48:38 PM	Tube furnace set to 0
8/11/2010	7:48:38 PM	Run finished at 7:48 PM
8/11/2010	8:02:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	8:02:27 PM	Recipe started at 8:02 PM
8/11/2010	8:02:27 PM	H2 valve closed
8/11/2010	8:02:27 PM	BCl3 valve closed
8/11/2010	8:02:27 PM	PH3 valve closed
8/11/2010	8:02:27 PM	SiCl4 pre valve closed
8/11/2010	8:02:27 PM	SiCl4 post valve closed
8/11/2010	8:02:27 PM	Main Vac valve closed
8/11/2010	8:02:27 PM	Bypass valve closed
8/11/2010	8:02:27 PM	Bubbler valve closed
8/11/2010	8:02:27 PM	Helium valve opened
8/11/2010	8:02:27 PM	Helium MFC set to  500.000000
8/11/2010	8:02:27 PM	H2 MFC set to  0.000000
8/11/2010	8:02:27 PM	BCl3 MFC set to  0.000000
8/11/2010	8:02:27 PM	PHl3 MFC set to  0.000000
8/11/2010	8:02:27 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:02:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:02:27 PM	Tube furnace set to 0
8/11/2010	8:02:27 PM	Helium valve closed
8/11/2010	8:02:27 PM	H2 valve closed
8/11/2010	8:02:27 PM	BCl3 valve closed
8/11/2010	8:02:27 PM	PH3 valve closed
8/11/2010	8:02:27 PM	SiCl4 pre valve closed
8/11/2010	8:02:27 PM	SiCl4 post valve closed
8/11/2010	8:02:27 PM	Main Vac valve closed
8/11/2010	8:02:27 PM	Bypass valve closed
8/11/2010	8:02:27 PM	Bubbler valve closed
8/11/2010	8:02:27 PM	Helium MFC set to  0.000000
8/11/2010	8:02:27 PM	H2 MFC set to  0.000000
8/11/2010	8:02:27 PM	BCl3 MFC set to  0.000000
8/11/2010	8:02:27 PM	PHl3 MFC set to  0.000000
8/11/2010	8:02:27 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:02:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:02:27 PM	Tube furnace set to 0
8/11/2010	8:02:27 PM	Run finished at 8:02 PM
8/11/2010	8:02:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	8:11:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	8:11:17 PM	Recipe started at 8:11 PM
8/11/2010	8:11:17 PM	Helium valve closed
8/11/2010	8:11:17 PM	H2 valve closed
8/11/2010	8:11:17 PM	BCl3 valve closed
8/11/2010	8:11:17 PM	PH3 valve closed
8/11/2010	8:11:17 PM	SiCl4 pre valve closed
8/11/2010	8:11:17 PM	SiCl4 post valve closed
8/11/2010	8:11:17 PM	Main Vac valve closed
8/11/2010	8:11:17 PM	Bubbler valve closed
8/11/2010	8:11:17 PM	Bypass valve opened
8/11/2010	8:11:17 PM	Helium MFC set to  0.000000
8/11/2010	8:11:17 PM	H2 MFC set to  0.000000
8/11/2010	8:11:17 PM	BCl3 MFC set to  0.000000
8/11/2010	8:11:17 PM	PHl3 MFC set to  0.000000
8/11/2010	8:11:17 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:11:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:11:17 PM	Tube furnace set to 0
8/11/2010	8:11:55 PM	Helium valve closed
8/11/2010	8:11:55 PM	H2 valve closed
8/11/2010	8:11:55 PM	BCl3 valve closed
8/11/2010	8:11:55 PM	PH3 valve closed
8/11/2010	8:11:55 PM	SiCl4 pre valve closed
8/11/2010	8:11:55 PM	SiCl4 post valve closed
8/11/2010	8:11:55 PM	Bubbler valve closed
8/11/2010	8:11:55 PM	Main Vac valve opened
8/11/2010	8:11:55 PM	Bypass valve opened
8/11/2010	8:11:55 PM	Helium MFC set to  0.000000
8/11/2010	8:11:55 PM	H2 MFC set to  0.000000
8/11/2010	8:11:55 PM	BCl3 MFC set to  0.000000
8/11/2010	8:11:55 PM	PHl3 MFC set to  0.000000
8/11/2010	8:11:55 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:11:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:11:55 PM	Tube furnace set to 0
8/11/2010	8:12:55 PM	H2 valve closed
8/11/2010	8:12:55 PM	BCl3 valve closed
8/11/2010	8:12:55 PM	PH3 valve closed
8/11/2010	8:12:55 PM	SiCl4 pre valve closed
8/11/2010	8:12:55 PM	SiCl4 post valve closed
8/11/2010	8:12:55 PM	Bubbler valve closed
8/11/2010	8:12:55 PM	Helium valve opened
8/11/2010	8:12:55 PM	Main Vac valve opened
8/11/2010	8:12:55 PM	Bypass valve opened
8/11/2010	8:12:55 PM	Helium MFC set to  100.000000
8/11/2010	8:12:55 PM	H2 MFC set to  0.000000
8/11/2010	8:12:55 PM	BCl3 MFC set to  0.000000
8/11/2010	8:12:55 PM	PHl3 MFC set to  0.000000
8/11/2010	8:12:55 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:12:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:12:56 PM	Tube furnace set to 0
8/11/2010	8:21:56 PM	Helium valve closed
8/11/2010	8:21:56 PM	H2 valve closed
8/11/2010	8:21:56 PM	BCl3 valve closed
8/11/2010	8:21:56 PM	PH3 valve closed
8/11/2010	8:21:56 PM	SiCl4 pre valve closed
8/11/2010	8:21:56 PM	SiCl4 post valve closed
8/11/2010	8:21:56 PM	Bubbler valve closed
8/11/2010	8:21:56 PM	Main Vac valve opened
8/11/2010	8:21:56 PM	Bypass valve opened
8/11/2010	8:21:56 PM	Helium MFC set to  0.000000
8/11/2010	8:21:56 PM	H2 MFC set to  0.000000
8/11/2010	8:21:56 PM	BCl3 MFC set to  0.000000
8/11/2010	8:21:56 PM	PHl3 MFC set to  0.000000
8/11/2010	8:21:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:21:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:21:56 PM	Tube furnace set to 0
8/11/2010	8:22:56 PM	H2 valve closed
8/11/2010	8:22:56 PM	BCl3 valve closed
8/11/2010	8:22:56 PM	PH3 valve closed
8/11/2010	8:22:56 PM	SiCl4 pre valve closed
8/11/2010	8:22:56 PM	SiCl4 post valve closed
8/11/2010	8:22:56 PM	Bubbler valve closed
8/11/2010	8:22:56 PM	Helium valve opened
8/11/2010	8:22:56 PM	Main Vac valve opened
8/11/2010	8:22:56 PM	Bypass valve opened
8/11/2010	8:22:56 PM	Helium MFC set to  100.000000
8/11/2010	8:22:56 PM	H2 MFC set to  0.000000
8/11/2010	8:22:56 PM	BCl3 MFC set to  0.000000
8/11/2010	8:22:56 PM	PHl3 MFC set to  0.000000
8/11/2010	8:22:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:22:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:22:56 PM	Tube furnace set to 0
8/11/2010	8:31:56 PM	Helium valve closed
8/11/2010	8:31:56 PM	H2 valve closed
8/11/2010	8:31:56 PM	BCl3 valve closed
8/11/2010	8:31:56 PM	PH3 valve closed
8/11/2010	8:31:56 PM	SiCl4 pre valve closed
8/11/2010	8:31:56 PM	SiCl4 post valve closed
8/11/2010	8:31:56 PM	Bubbler valve closed
8/11/2010	8:31:56 PM	Main Vac valve opened
8/11/2010	8:31:56 PM	Bypass valve opened
8/11/2010	8:31:56 PM	Helium MFC set to  0.000000
8/11/2010	8:31:56 PM	H2 MFC set to  0.000000
8/11/2010	8:31:56 PM	BCl3 MFC set to  0.000000
8/11/2010	8:31:56 PM	PHl3 MFC set to  0.000000
8/11/2010	8:31:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:31:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:31:56 PM	Tube furnace set to 0
8/11/2010	8:32:56 PM	H2 valve closed
8/11/2010	8:32:56 PM	BCl3 valve closed
8/11/2010	8:32:56 PM	PH3 valve closed
8/11/2010	8:32:56 PM	SiCl4 pre valve closed
8/11/2010	8:32:56 PM	SiCl4 post valve closed
8/11/2010	8:32:56 PM	Bubbler valve closed
8/11/2010	8:32:56 PM	Helium valve opened
8/11/2010	8:32:56 PM	Main Vac valve opened
8/11/2010	8:32:56 PM	Bypass valve opened
8/11/2010	8:32:56 PM	Helium MFC set to  100.000000
8/11/2010	8:32:56 PM	H2 MFC set to  0.000000
8/11/2010	8:32:56 PM	BCl3 MFC set to  0.000000
8/11/2010	8:32:56 PM	PHl3 MFC set to  0.000000
8/11/2010	8:32:56 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:32:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:32:56 PM	Tube furnace set to 0
8/11/2010	8:40:15 PM	Helium valve closed
8/11/2010	8:40:15 PM	H2 valve closed
8/11/2010	8:40:15 PM	BCl3 valve closed
8/11/2010	8:40:15 PM	PH3 valve closed
8/11/2010	8:40:15 PM	SiCl4 pre valve closed
8/11/2010	8:40:15 PM	SiCl4 post valve closed
8/11/2010	8:40:15 PM	Bubbler valve closed
8/11/2010	8:40:15 PM	Main Vac valve opened
8/11/2010	8:40:15 PM	Bypass valve opened
8/11/2010	8:40:15 PM	Helium MFC set to  0.000000
8/11/2010	8:40:15 PM	H2 MFC set to  0.000000
8/11/2010	8:40:15 PM	BCl3 MFC set to  0.000000
8/11/2010	8:40:15 PM	PHl3 MFC set to  0.000000
8/11/2010	8:40:15 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:40:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:40:15 PM	Tube furnace set to 0
8/11/2010	8:40:16 PM	Run finished at 8:40 PM
8/11/2010	8:40:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	8:40:58 PM	Helium MFC set to  0.000000
8/11/2010	8:40:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	8:41:02 PM	Recipe started at 8:41 PM
8/11/2010	8:41:02 PM	Helium valve closed
8/11/2010	8:41:02 PM	H2 valve closed
8/11/2010	8:41:02 PM	BCl3 valve closed
8/11/2010	8:41:02 PM	PH3 valve closed
8/11/2010	8:41:02 PM	SiCl4 pre valve closed
8/11/2010	8:41:02 PM	SiCl4 post valve closed
8/11/2010	8:41:02 PM	Main Vac valve closed
8/11/2010	8:41:02 PM	Bubbler valve closed
8/11/2010	8:41:02 PM	Bypass valve opened
8/11/2010	8:41:02 PM	Helium MFC set to  0.000000
8/11/2010	8:41:02 PM	H2 MFC set to  0.000000
8/11/2010	8:41:02 PM	BCl3 MFC set to  0.000000
8/11/2010	8:41:02 PM	PHl3 MFC set to  0.000000
8/11/2010	8:41:02 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:41:02 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:41:02 PM	Tube furnace set to 0
8/11/2010	8:41:02 PM	Helium valve closed
8/11/2010	8:41:02 PM	H2 valve closed
8/11/2010	8:41:02 PM	BCl3 valve closed
8/11/2010	8:41:02 PM	PH3 valve closed
8/11/2010	8:41:02 PM	SiCl4 pre valve closed
8/11/2010	8:41:02 PM	SiCl4 post valve closed
8/11/2010	8:41:02 PM	Bubbler valve closed
8/11/2010	8:41:02 PM	Main Vac valve opened
8/11/2010	8:41:02 PM	Bypass valve opened
8/11/2010	8:41:02 PM	Helium MFC set to  0.000000
8/11/2010	8:41:02 PM	H2 MFC set to  0.000000
8/11/2010	8:41:02 PM	BCl3 MFC set to  0.000000
8/11/2010	8:41:02 PM	PHl3 MFC set to  0.000000
8/11/2010	8:41:02 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:41:02 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:41:03 PM	Tube furnace set to 0
8/11/2010	8:42:03 PM	H2 valve closed
8/11/2010	8:42:03 PM	BCl3 valve closed
8/11/2010	8:42:03 PM	PH3 valve closed
8/11/2010	8:42:03 PM	SiCl4 pre valve closed
8/11/2010	8:42:03 PM	SiCl4 post valve closed
8/11/2010	8:42:03 PM	Bubbler valve closed
8/11/2010	8:42:03 PM	Helium valve opened
8/11/2010	8:42:03 PM	Main Vac valve opened
8/11/2010	8:42:03 PM	Bypass valve opened
8/11/2010	8:42:03 PM	Helium MFC set to  100.000000
8/11/2010	8:42:03 PM	H2 MFC set to  0.000000
8/11/2010	8:42:03 PM	BCl3 MFC set to  0.000000
8/11/2010	8:42:03 PM	PHl3 MFC set to  0.000000
8/11/2010	8:42:03 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:42:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:42:03 PM	Tube furnace set to 0
8/11/2010	8:51:03 PM	Helium valve closed
8/11/2010	8:51:03 PM	H2 valve closed
8/11/2010	8:51:03 PM	BCl3 valve closed
8/11/2010	8:51:03 PM	PH3 valve closed
8/11/2010	8:51:03 PM	SiCl4 pre valve closed
8/11/2010	8:51:03 PM	SiCl4 post valve closed
8/11/2010	8:51:03 PM	Bubbler valve closed
8/11/2010	8:51:03 PM	Main Vac valve opened
8/11/2010	8:51:03 PM	Bypass valve opened
8/11/2010	8:51:03 PM	Helium MFC set to  0.000000
8/11/2010	8:51:03 PM	H2 MFC set to  0.000000
8/11/2010	8:51:03 PM	BCl3 MFC set to  0.000000
8/11/2010	8:51:03 PM	PHl3 MFC set to  0.000000
8/11/2010	8:51:03 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:51:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:51:03 PM	Tube furnace set to 0
8/11/2010	8:52:03 PM	H2 valve closed
8/11/2010	8:52:03 PM	BCl3 valve closed
8/11/2010	8:52:03 PM	PH3 valve closed
8/11/2010	8:52:03 PM	SiCl4 pre valve closed
8/11/2010	8:52:03 PM	SiCl4 post valve closed
8/11/2010	8:52:03 PM	Bubbler valve closed
8/11/2010	8:52:03 PM	Helium valve opened
8/11/2010	8:52:03 PM	Main Vac valve opened
8/11/2010	8:52:03 PM	Bypass valve opened
8/11/2010	8:52:03 PM	Helium MFC set to  100.000000
8/11/2010	8:52:03 PM	H2 MFC set to  0.000000
8/11/2010	8:52:03 PM	BCl3 MFC set to  0.000000
8/11/2010	8:52:03 PM	PHl3 MFC set to  0.000000
8/11/2010	8:52:03 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:52:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:52:03 PM	Tube furnace set to 0
8/11/2010	8:56:44 PM	Run aborted at 8:56 PM
8/11/2010	8:56:44 PM	Helium valve closed
8/11/2010	8:56:44 PM	H2 valve closed
8/11/2010	8:56:44 PM	BCl3 valve closed
8/11/2010	8:56:44 PM	PH3 valve closed
8/11/2010	8:56:44 PM	SiCl4 pre valve closed
8/11/2010	8:56:44 PM	SiCl4 post valve closed
8/11/2010	8:56:44 PM	Bypass valve closed
8/11/2010	8:56:44 PM	Main Vac valve closed
8/11/2010	8:56:44 PM	Bubbler valve closed
8/11/2010	8:56:44 PM	Helium MFC set to  0.000000
8/11/2010	8:56:44 PM	H2 MFC set to  0.000000
8/11/2010	8:56:44 PM	BCl3 MFC set to  0.000000
8/11/2010	8:56:44 PM	PHl3 MFC set to  0.000000
8/11/2010	8:56:44 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:56:44 PM	Tube furnace set to 0
8/11/2010	8:56:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/11/2010	8:56:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	8:56:45 PM	Recipe started at 8:56 PM
8/11/2010	8:56:45 PM	Helium valve closed
8/11/2010	8:56:45 PM	H2 valve closed
8/11/2010	8:56:45 PM	BCl3 valve closed
8/11/2010	8:56:45 PM	PH3 valve closed
8/11/2010	8:56:45 PM	SiCl4 pre valve closed
8/11/2010	8:56:45 PM	SiCl4 post valve closed
8/11/2010	8:56:45 PM	Main Vac valve closed
8/11/2010	8:56:45 PM	Bubbler valve closed
8/11/2010	8:56:45 PM	Bypass valve opened
8/11/2010	8:56:45 PM	Helium MFC set to  0.000000
8/11/2010	8:56:45 PM	H2 MFC set to  0.000000
8/11/2010	8:56:45 PM	BCl3 MFC set to  0.000000
8/11/2010	8:56:45 PM	PHl3 MFC set to  0.000000
8/11/2010	8:56:45 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:56:45 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:56:45 PM	Tube furnace set to 0
8/11/2010	8:56:45 PM	Helium valve closed
8/11/2010	8:56:45 PM	H2 valve closed
8/11/2010	8:56:45 PM	BCl3 valve closed
8/11/2010	8:56:45 PM	PH3 valve closed
8/11/2010	8:56:45 PM	SiCl4 pre valve closed
8/11/2010	8:56:45 PM	SiCl4 post valve closed
8/11/2010	8:56:45 PM	Bubbler valve closed
8/11/2010	8:56:45 PM	Main Vac valve opened
8/11/2010	8:56:45 PM	Bypass valve opened
8/11/2010	8:56:45 PM	Helium MFC set to  0.000000
8/11/2010	8:56:45 PM	H2 MFC set to  0.000000
8/11/2010	8:56:45 PM	BCl3 MFC set to  0.000000
8/11/2010	8:56:45 PM	PHl3 MFC set to  0.000000
8/11/2010	8:56:45 PM	SiCl4 MFC set to  0.000000
8/11/2010	8:56:45 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	8:56:46 PM	Tube furnace set to 0
8/11/2010	8:56:46 PM	Run finished at 8:56 PM
8/11/2010	8:56:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	8:57:34 PM	Helium MFC set to  100.000000
8/11/2010	8:57:36 PM	Helium valve opened
8/11/2010	9:10:09 PM	Helium valve closed
8/11/2010	9:10:55 PM	Recipe started at 9:10 PM
8/11/2010	9:10:55 PM	Helium valve closed
8/11/2010	9:10:55 PM	BCl3 valve closed
8/11/2010	9:10:55 PM	PH3 valve closed
8/11/2010	9:10:55 PM	SiCl4 pre valve closed
8/11/2010	9:10:55 PM	SiCl4 post valve closed
8/11/2010	9:10:55 PM	Main Vac valve closed
8/11/2010	9:10:55 PM	Bypass valve closed
8/11/2010	9:10:55 PM	Bubbler valve closed
8/11/2010	9:10:55 PM	H2 valve opened
8/11/2010	9:10:55 PM	Helium MFC set to  0.000000
8/11/2010	9:10:55 PM	H2 MFC set to  500.000000
8/11/2010	9:10:55 PM	BCl3 MFC set to  0.000000
8/11/2010	9:10:55 PM	PHl3 MFC set to  0.000000
8/11/2010	9:10:55 PM	SiCl4 MFC set to  0.000000
8/11/2010	9:10:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	9:10:55 PM	Tube furnace set to 1000
8/11/2010	9:12:13 PM	Helium valve closed
8/11/2010	9:12:13 PM	BCl3 valve closed
8/11/2010	9:12:13 PM	PH3 valve closed
8/11/2010	9:12:13 PM	SiCl4 pre valve closed
8/11/2010	9:12:13 PM	SiCl4 post valve closed
8/11/2010	9:12:13 PM	Main Vac valve closed
8/11/2010	9:12:13 PM	Bypass valve closed
8/11/2010	9:12:13 PM	H2 valve opened
8/11/2010	9:12:13 PM	Bubbler valve opened
8/11/2010	9:12:13 PM	Helium MFC set to  0.000000
8/11/2010	9:12:13 PM	H2 MFC set to  500.000000
8/11/2010	9:12:13 PM	BCl3 MFC set to  0.000000
8/11/2010	9:12:13 PM	PHl3 MFC set to  0.000000
8/11/2010	9:12:13 PM	SiCl4 MFC set to  0.000000
8/11/2010	9:12:13 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	9:12:14 PM	Tube furnace set to 1000
8/11/2010	9:32:14 PM	Helium valve closed
8/11/2010	9:32:14 PM	PH3 valve closed
8/11/2010	9:32:14 PM	Main Vac valve closed
8/11/2010	9:32:14 PM	Bypass valve closed
8/11/2010	9:32:14 PM	H2 valve opened
8/11/2010	9:32:14 PM	BCl3 valve opened
8/11/2010	9:32:14 PM	SiCl4 pre valve opened
8/11/2010	9:32:14 PM	SiCl4 post valve opened
8/11/2010	9:32:14 PM	Bubbler valve opened
8/11/2010	9:32:14 PM	Helium MFC set to  0.000000
8/11/2010	9:32:14 PM	H2 MFC set to  500.000000
8/11/2010	9:32:14 PM	BCl3 MFC set to  35.000000
8/11/2010	9:32:14 PM	PHl3 MFC set to  0.000000
8/11/2010	9:32:14 PM	SiCl4 MFC set to  50.000000
8/11/2010	9:32:14 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	9:32:14 PM	Tube furnace set to 1000
8/11/2010	9:44:14 PM	Helium valve closed
8/11/2010	9:44:14 PM	BCl3 valve closed
8/11/2010	9:44:14 PM	PH3 valve closed
8/11/2010	9:44:14 PM	SiCl4 pre valve closed
8/11/2010	9:44:14 PM	SiCl4 post valve closed
8/11/2010	9:44:14 PM	Main Vac valve closed
8/11/2010	9:44:14 PM	Bypass valve closed
8/11/2010	9:44:14 PM	H2 valve opened
8/11/2010	9:44:14 PM	Bubbler valve opened
8/11/2010	9:44:14 PM	Helium MFC set to  0.000000
8/11/2010	9:44:14 PM	H2 MFC set to  500.000000
8/11/2010	9:44:14 PM	BCl3 MFC set to  0.000000
8/11/2010	9:44:14 PM	PHl3 MFC set to  0.000000
8/11/2010	9:44:14 PM	SiCl4 MFC set to  0.000000
8/11/2010	9:44:14 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	9:44:14 PM	Tube furnace set to 750
8/11/2010	10:04:14 PM	H2 valve closed
8/11/2010	10:04:14 PM	BCl3 valve closed
8/11/2010	10:04:14 PM	PH3 valve closed
8/11/2010	10:04:14 PM	SiCl4 pre valve closed
8/11/2010	10:04:14 PM	SiCl4 post valve closed
8/11/2010	10:04:14 PM	Main Vac valve closed
8/11/2010	10:04:14 PM	Bypass valve closed
8/11/2010	10:04:14 PM	Helium valve opened
8/11/2010	10:04:14 PM	Bubbler valve opened
8/11/2010	10:04:14 PM	Helium MFC set to  500.000000
8/11/2010	10:04:14 PM	H2 MFC set to  0.000000
8/11/2010	10:04:14 PM	BCl3 MFC set to  0.000000
8/11/2010	10:04:14 PM	PHl3 MFC set to  0.000000
8/11/2010	10:04:14 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:04:14 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	10:04:14 PM	Tube furnace set to 0
8/11/2010	10:12:43 PM	Run aborted at 10:12 PM
8/11/2010	10:12:43 PM	Helium valve closed
8/11/2010	10:12:43 PM	H2 valve closed
8/11/2010	10:12:43 PM	BCl3 valve closed
8/11/2010	10:12:43 PM	PH3 valve closed
8/11/2010	10:12:43 PM	SiCl4 pre valve closed
8/11/2010	10:12:43 PM	SiCl4 post valve closed
8/11/2010	10:12:43 PM	Bypass valve closed
8/11/2010	10:12:43 PM	Main Vac valve closed
8/11/2010	10:12:43 PM	Bubbler valve closed
8/11/2010	10:12:43 PM	Helium MFC set to  0.000000
8/11/2010	10:12:43 PM	H2 MFC set to  0.000000
8/11/2010	10:12:43 PM	BCl3 MFC set to  0.000000
8/11/2010	10:12:43 PM	PHl3 MFC set to  0.000000
8/11/2010	10:12:43 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:12:44 PM	Tube furnace set to 0
8/11/2010	10:12:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	10:12:46 PM	Recipe started at 10:12 PM
8/11/2010	10:12:46 PM	H2 valve closed
8/11/2010	10:12:46 PM	BCl3 valve closed
8/11/2010	10:12:46 PM	PH3 valve closed
8/11/2010	10:12:46 PM	SiCl4 pre valve closed
8/11/2010	10:12:46 PM	SiCl4 post valve closed
8/11/2010	10:12:46 PM	Main Vac valve closed
8/11/2010	10:12:46 PM	Bypass valve closed
8/11/2010	10:12:46 PM	Bubbler valve closed
8/11/2010	10:12:46 PM	Helium valve opened
8/11/2010	10:12:46 PM	Helium MFC set to  500.000000
8/11/2010	10:12:46 PM	H2 MFC set to  0.000000
8/11/2010	10:12:46 PM	BCl3 MFC set to  0.000000
8/11/2010	10:12:46 PM	PHl3 MFC set to  0.000000
8/11/2010	10:12:46 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:12:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	10:12:46 PM	Tube furnace set to 0
8/11/2010	10:12:46 PM	Helium valve closed
8/11/2010	10:12:46 PM	H2 valve closed
8/11/2010	10:12:46 PM	BCl3 valve closed
8/11/2010	10:12:46 PM	PH3 valve closed
8/11/2010	10:12:46 PM	SiCl4 pre valve closed
8/11/2010	10:12:46 PM	SiCl4 post valve closed
8/11/2010	10:12:46 PM	Main Vac valve closed
8/11/2010	10:12:46 PM	Bypass valve closed
8/11/2010	10:12:46 PM	Bubbler valve closed
8/11/2010	10:12:46 PM	Helium MFC set to  0.000000
8/11/2010	10:12:46 PM	H2 MFC set to  0.000000
8/11/2010	10:12:46 PM	BCl3 MFC set to  0.000000
8/11/2010	10:12:46 PM	PHl3 MFC set to  0.000000
8/11/2010	10:12:46 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:12:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	10:12:46 PM	Tube furnace set to 0
8/11/2010	10:12:46 PM	Run finished at 10:12 PM
8/11/2010	10:12:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2010	10:16:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2010	10:16:04 PM	Recipe started at 10:16 PM
8/11/2010	10:16:04 PM	Helium valve closed
8/11/2010	10:16:04 PM	H2 valve closed
8/11/2010	10:16:04 PM	BCl3 valve closed
8/11/2010	10:16:04 PM	PH3 valve closed
8/11/2010	10:16:04 PM	SiCl4 pre valve closed
8/11/2010	10:16:04 PM	SiCl4 post valve closed
8/11/2010	10:16:04 PM	Main Vac valve closed
8/11/2010	10:16:04 PM	Bubbler valve closed
8/11/2010	10:16:04 PM	Bypass valve opened
8/11/2010	10:16:04 PM	Helium MFC set to  0.000000
8/11/2010	10:16:04 PM	H2 MFC set to  0.000000
8/11/2010	10:16:04 PM	BCl3 MFC set to  0.000000
8/11/2010	10:16:04 PM	PHl3 MFC set to  0.000000
8/11/2010	10:16:04 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:16:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	10:16:04 PM	Tube furnace set to 0
8/11/2010	10:16:41 PM	Helium valve closed
8/11/2010	10:16:41 PM	H2 valve closed
8/11/2010	10:16:41 PM	BCl3 valve closed
8/11/2010	10:16:41 PM	PH3 valve closed
8/11/2010	10:16:41 PM	SiCl4 pre valve closed
8/11/2010	10:16:41 PM	SiCl4 post valve closed
8/11/2010	10:16:41 PM	Bubbler valve closed
8/11/2010	10:16:41 PM	Main Vac valve opened
8/11/2010	10:16:41 PM	Bypass valve opened
8/11/2010	10:16:41 PM	Helium MFC set to  0.000000
8/11/2010	10:16:41 PM	H2 MFC set to  0.000000
8/11/2010	10:16:41 PM	BCl3 MFC set to  0.000000
8/11/2010	10:16:41 PM	PHl3 MFC set to  0.000000
8/11/2010	10:16:41 PM	SiCl4 MFC set to  0.000000
8/11/2010	10:16:41 PM	Bypass solenoid MFC set to  0.000000
8/11/2010	10:16:41 PM	Tube furnace set to 0
8/11/2010	10:16:42 PM	Run finished at 10:16 PM
8/11/2010	10:16:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
